JPS61181228U - - Google Patents
Info
- Publication number
- JPS61181228U JPS61181228U JP6314085U JP6314085U JPS61181228U JP S61181228 U JPS61181228 U JP S61181228U JP 6314085 U JP6314085 U JP 6314085U JP 6314085 U JP6314085 U JP 6314085U JP S61181228 U JPS61181228 U JP S61181228U
- Authority
- JP
- Japan
- Prior art keywords
- clean room
- air
- purification device
- dust removal
- blowout port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004887 air purification Methods 0.000 claims description 4
- 239000000428 dust Substances 0.000 claims description 4
- 230000003749 cleanliness Effects 0.000 claims 1
- 238000001514 detection method Methods 0.000 claims 1
- 238000000746 purification Methods 0.000 claims 1
- 230000003068 static effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000001186 cumulative effect Effects 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6314085U JPS61181228U (enExample) | 1985-04-30 | 1985-04-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6314085U JPS61181228U (enExample) | 1985-04-30 | 1985-04-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61181228U true JPS61181228U (enExample) | 1986-11-12 |
Family
ID=30593006
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6314085U Pending JPS61181228U (enExample) | 1985-04-30 | 1985-04-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61181228U (enExample) |
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1985
- 1985-04-30 JP JP6314085U patent/JPS61181228U/ja active Pending