JPS61180204A - Diffusing method for metal by heating - Google Patents
Diffusing method for metal by heatingInfo
- Publication number
- JPS61180204A JPS61180204A JP60021049A JP2104985A JPS61180204A JP S61180204 A JPS61180204 A JP S61180204A JP 60021049 A JP60021049 A JP 60021049A JP 2104985 A JP2104985 A JP 2104985A JP S61180204 A JPS61180204 A JP S61180204A
- Authority
- JP
- Japan
- Prior art keywords
- metal
- holder
- substrate
- heating
- crystal substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
- G02B6/1342—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using diffusion
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、結晶基板の一部へ金属を加熱拡散し、屈折率
を高めて光導波路を作製する金属加熱拡散方法に関し、
とくに誘電体材料Li1B40−1結晶基板を用いた金
属加熱拡散時におけるL i 2 B60.結晶基板の
支持方法に関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a metal heating diffusion method for fabricating an optical waveguide by heating and diffusing metal into a part of a crystal substrate to increase the refractive index.
In particular, Li 2 B60 during metal heating diffusion using a dielectric material Li1B40-1 crystal substrate. The present invention relates to a method for supporting a crystal substrate.
従来、ガラスまたは誘電体L i HA 03などの結
晶基板へ金属を加熱拡散して光導波路を作製することは
行われている。然し、誘電体材料Li2B401 結晶
基板へ金属を加熱拡散して光導波路を作製することは未
だ行われていない。Conventionally, optical waveguides have been fabricated by heating and diffusing metal onto a crystal substrate such as glass or dielectric L i HA 03. However, it has not yet been possible to fabricate an optical waveguide by heating and diffusing metal into a crystal substrate of dielectric material Li2B401.
本発明は、LL* 11140g結晶基板を用いて金属
を加熱拡散し光導波路を作製する方法において、金属加
熱拡散時に、Li*B、O1結晶基板を載置するホルダ
とLzJ40g結晶基板の間を、金属拡散面以外の位置
に配置したLi@B4O1結晶片で支持することにより
、Li2B60−1 結晶基板とホルダとの接触部に反
応が起り結合する現象を除去したLi2B60−1 結
晶基板の金属加熱拡散方法を提供するものである。The present invention provides a method for fabricating an optical waveguide by heating and diffusing metal using a LL*11140g crystal substrate. Metal heating diffusion of the Li2B60-1 crystal substrate eliminates the phenomenon of reaction and bonding occurring at the contact area between the Li2B60-1 crystal substrate and the holder by supporting it with a Li@B4O1 crystal piece placed at a position other than the metal diffusion surface. The present invention provides a method.
以下図面によ如説明する。This will be explained below with reference to the drawings.
第2図に示すように、金属を真空蒸着またはスパッタし
た後パターン形成・した金属層2を有し、ホルダ4上に
載置したLi2B401結晶基板1を高温に加熱保持し
、金属をLi2%0−1結晶基板1に加熱拡散させ、第
3図に示すように拡散光導波路5を作製する。このとき
、第2図に示すような状態のLi2B40y結晶基板1
を直接石英ガラスなどのホルダ4に載置して加熱保持す
ると、LzlZ1407結晶基板1とホルダ4の、たと
えば石英ガラスとの接触部が反応を起し、結合される問
題がある。As shown in FIG. 2, a Li2B401 crystal substrate 1, which has a metal layer 2 formed by vacuum evaporation or sputtering and then patterning, and is placed on a holder 4, is heated and held at a high temperature, and the metal is coated with Li2% 0. -1 The crystal substrate 1 is heated and diffused to produce a diffused optical waveguide 5 as shown in FIG. At this time, the Li2B40y crystal substrate 1 in the state shown in FIG.
If the LzlZ1407 crystal substrate 1 and the holder 4 are directly placed on a holder 4 such as quartz glass and held under heat, there is a problem in that the contact portion between the LzlZ1407 crystal substrate 1 and the quartz glass, for example, causes a reaction and is bonded.
゛ 本発明は第1図に示すように、Li2B40q 結
晶基板1とホルダ4との間を、Li2B<01結晶基板
1に金属層2が加熱拡散する面を含まない位置に配置し
た他のLi2B4O7結晶片3で支持して加熱保持する
ことにより、Li2B、07結晶基板1とホルダ4との
間に反応が起り結合する現象を除去している。゛ As shown in FIG. 1, the present invention provides another Li2B4O7 crystal which is arranged between the Li2B40q crystal substrate 1 and the holder 4 in a position that does not include the surface where the metal layer 2 heats and diffuses into the Li2B<01 crystal substrate 1. By supporting the Li2B, 07 crystal substrate 1 with the piece 3 and holding it under heat, a phenomenon in which a reaction occurs between the Li2B, 07 crystal substrate 1 and the holder 4 and the holder 4 is bonded can be eliminated.
なおLi2B、01結晶片3の数は、本実施例では2個
を用いたが、1個でも任意の複数個でもよく、Li2B
4O,1結晶基板1の金属層2のパターンが形成され、
金属熱拡散する面を含まない位置を支持するよう配置す
ればよい。Although two Li2B,01 crystal pieces 3 were used in this example, it may be one or any plurality of Li2B,01 crystal pieces 3.
A pattern of the metal layer 2 of the 4O,1 crystal substrate 1 is formed,
It may be arranged so as to support a position that does not include a surface where metal heat is diffused.
以上述べたように、本発明はLi2B<01結晶基板と
ホルダの間を、L i 2 B40−1結晶基板に金属
層のパターンが加熱拡散する面を含まない位置に配置し
たLi2B40−1結晶片で支持して加熱保持する方法
であるから、Li2B60q結晶基板とホルダが直接接
触し反応して結合することがなく 、L t 2 B4
0g結晶基板に金属を安定に加熱拡散することができ、
Li2’B、at結晶基板を用いた金属熱拡散法による
光導波路の作製に適用して効果がある。As described above, the present invention provides a Li2B40-1 crystal piece that is arranged between the Li2B<01 crystal substrate and the holder in a position that does not include the surface where the metal layer pattern heats and diffuses on the Li2B40-1 crystal substrate. Since the Li2B60q crystal substrate and the holder do not come into direct contact and react to form a bond, L t 2 B4
It is possible to stably heat and diffuse metal onto a 0g crystal substrate,
It is effective when applied to the fabrication of optical waveguides by the metal thermal diffusion method using Li2'B, at crystal substrates.
第1図は本発明の金属加熱拡散方法を説明する図、
第2図は考えられるLi2B40−1結晶基板を用いた
金属加熱拡散方法を説明する図、
第3図はLi2B<01結晶基板に金属加熱拡散方法で
作製した拡散光導波路の状態を示す図である。
1・・・Li1B<01結晶基板
2・・・金属層
5・・・Li1B60−1結晶片
4・・・ホルダ
5、・・・拡散光導波路Figure 1 is a diagram explaining the metal heating diffusion method of the present invention, Figure 2 is a diagram explaining a possible metal heating diffusion method using a Li2B40-1 crystal substrate, and Figure 3 is a diagram explaining the metal heating diffusion method using a Li2B<01 crystal substrate. It is a figure which shows the state of the diffused optical waveguide produced by the heating diffusion method. 1... Li1B<01 crystal substrate 2... Metal layer 5... Li1B60-1 crystal piece 4... Holder 5,... Diffusing optical waveguide
Claims (1)
晶基板へ金属層のパターンを形成し、金属加熱拡散を行
い拡散光導波路を作製する方法において、前記Li_2
B_4O_7結晶板と前記ホルダの間を、前記Li_2
B_4O_7結晶基板の金属拡散面を含まぬ位置に配置
したLi_2B_4O_7結晶片により支持して前記L
i_2B_4O_7結晶基板を加熱保持する ことを特徴とする金属加熱拡散方法。[Claims] In a method of forming a metal layer pattern on a dielectric material Li_2B_4O_7 crystal substrate placed on a holder and performing metal heating diffusion to produce a diffused optical waveguide, the Li_2
Between the B_4O_7 crystal plate and the holder, the Li_2
The above-mentioned L
A metal heating diffusion method characterized by heating and holding an i_2B_4O_7 crystal substrate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60021049A JPS61180204A (en) | 1985-02-06 | 1985-02-06 | Diffusing method for metal by heating |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60021049A JPS61180204A (en) | 1985-02-06 | 1985-02-06 | Diffusing method for metal by heating |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61180204A true JPS61180204A (en) | 1986-08-12 |
Family
ID=12044061
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60021049A Pending JPS61180204A (en) | 1985-02-06 | 1985-02-06 | Diffusing method for metal by heating |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61180204A (en) |
-
1985
- 1985-02-06 JP JP60021049A patent/JPS61180204A/en active Pending
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