JPS61180204A - Diffusing method for metal by heating - Google Patents

Abstract

PURPOSE:To prevent the bonding in the contact part between an Li2B4O7 crystal substrate and holder as a result of the reaction induced therein by supporting the holder to be imposed with the Li2B4O7 crystal substrate and the Li2B4O7 crystal substrate by means of the Li2B4O7 crystal piece disposed therebetween in the position except the metal diffusing surface in the stage of diffusing the metal by heating. CONSTITUTION:A diffused optical waveguide 5 is manufactured by heating and holding the Li2B4O7 crystal substrate 1 having the metallic layer 2 patterned after vapor deposition or sputtering of the metal and imposed on the holder 4 to and at a high temp. and diffusing the metal by heating into the substrate 1. The substrate 1 and the holder 4 are supported by the other Li2B4O7 crystal piece 3 disposed therebetween in the position without including the surface where the metal layer 2 is diffused by heating to the substrate 1. The substrate 1 and holder are heated and held in such a state. The bonding of the substrate 1 and the holder 4 by the reaction induced therebetween is thus obviated.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a metal heating diffusion method for fabricating an optical waveguide by heating and diffusing metal into a part of a crystal substrate to increase the refractive index.
In particular, Li 2 B60 during metal heating diffusion using a dielectric material Li1B40-1 crystal substrate. The present invention relates to a method for supporting a crystal substrate.

[Conventional technology]

Conventionally, optical waveguides have been fabricated by heating and diffusing metal onto a crystal substrate such as glass or dielectric L i HA 03. However, it has not yet been possible to fabricate an optical waveguide by heating and diffusing metal into a crystal substrate of dielectric material Li2B401.

[Summary of the invention]

The present invention provides a method for fabricating an optical waveguide by heating and diffusing metal using a LL*11140g crystal substrate. Metal heating diffusion of the Li2B60-1 crystal substrate eliminates the phenomenon of reaction and bonding occurring at the contact area between the Li2B60-1 crystal substrate and the holder by supporting it with a Li@B4O1 crystal piece placed at a position other than the metal diffusion surface. The present invention provides a method.

This will be explained below with reference to the drawings.

〔Example〕

As shown in FIG. 2, a Li2B401 crystal substrate 1, which has a metal layer 2 formed by vacuum evaporation or sputtering and then patterning, and is placed on a holder 4, is heated and held at a high temperature, and the metal is coated with Li2% 0. -1 The crystal substrate 1 is heated and diffused to produce a diffused optical waveguide 5 as shown in FIG. At this time, the Li2B40y crystal substrate 1 in the state shown in FIG.
If the LzlZ1407 crystal substrate 1 and the holder 4 are directly placed on a holder 4 such as quartz glass and held under heat, there is a problem in that the contact portion between the LzlZ1407 crystal substrate 1 and the quartz glass, for example, causes a reaction and is bonded.

゛ As shown in FIG. 1, the present invention provides another Li2B4O7 crystal which is arranged between the Li2B40q crystal substrate 1 and the holder 4 in a position that does not include the surface where the metal layer 2 heats and diffuses into the Li2B<01 crystal substrate 1. By supporting the Li2B, 07 crystal substrate 1 with the piece 3 and holding it under heat, a phenomenon in which a reaction occurs between the Li2B, 07 crystal substrate 1 and the holder 4 and the holder 4 is bonded can be eliminated.

Although two Li2B,01 crystal pieces 3 were used in this example, it may be one or any plurality of Li2B,01 crystal pieces 3.
A pattern of the metal layer 2 of the 4O,1 crystal substrate 1 is formed,
It may be arranged so as to support a position that does not include a surface where metal heat is diffused.

〔Effect of the invention〕

As described above, the present invention provides a Li2B40-1 crystal piece that is arranged between the Li2B<01 crystal substrate and the holder in a position that does not include the surface where the metal layer pattern heats and diffuses on the Li2B40-1 crystal substrate. Since the Li2B60q crystal substrate and the holder do not come into direct contact and react to form a bond, L t 2 B4
It is possible to stably heat and diffuse metal onto a 0g crystal substrate,
It is effective when applied to the fabrication of optical waveguides by the metal thermal diffusion method using Li2'B, at crystal substrates.

[Brief explanation of drawings]

Figure 1 is a diagram explaining the metal heating diffusion method of the present invention, Figure 2 is a diagram explaining a possible metal heating diffusion method using a Li2B40-1 crystal substrate, and Figure 3 is a diagram explaining the metal heating diffusion method using a Li2B<01 crystal substrate. It is a figure which shows the state of the diffused optical waveguide produced by the heating diffusion method. 1... Li1B<01 crystal substrate 2... Metal layer 5... Li1B60-1 crystal piece 4... Holder 5,... Diffusing optical waveguide

Claims (1)

[Claims] In a method of forming a metal layer pattern on a dielectric material Li_2B_4O_7 crystal substrate placed on a holder and performing metal heating diffusion to produce a diffused optical waveguide, the Li_2
Between the B_4O_7 crystal plate and the holder, the Li_2
The above-mentioned L
A metal heating diffusion method characterized by heating and holding an i_2B_4O_7 crystal substrate.