JPS61179747U - - Google Patents
Info
- Publication number
- JPS61179747U JPS61179747U JP6348285U JP6348285U JPS61179747U JP S61179747 U JPS61179747 U JP S61179747U JP 6348285 U JP6348285 U JP 6348285U JP 6348285 U JP6348285 U JP 6348285U JP S61179747 U JPS61179747 U JP S61179747U
- Authority
- JP
- Japan
- Prior art keywords
- probe card
- insulating substrate
- contact
- view
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- 239000008188 pellet Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6348285U JPS61179747U (US20020051482A1-20020502-M00012.png) | 1985-04-27 | 1985-04-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6348285U JPS61179747U (US20020051482A1-20020502-M00012.png) | 1985-04-27 | 1985-04-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61179747U true JPS61179747U (US20020051482A1-20020502-M00012.png) | 1986-11-10 |
Family
ID=30593671
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6348285U Pending JPS61179747U (US20020051482A1-20020502-M00012.png) | 1985-04-27 | 1985-04-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61179747U (US20020051482A1-20020502-M00012.png) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6414936A (en) * | 1987-07-08 | 1989-01-19 | Tokyo Electron Ltd | Inspecting apparatus |
| JPH0348171A (ja) * | 1989-07-17 | 1991-03-01 | Mitsubishi Materials Corp | 混成集積回路板の電気的特性検査を行う方法 |
| JPH03120474A (ja) * | 1989-10-02 | 1991-05-22 | Nippon Denshi Zairyo Kk | プローブカード |
| JPH03158765A (ja) * | 1989-11-16 | 1991-07-08 | Nippon Denshi Zairyo Kk | プローブカード |
| JPH08220138A (ja) * | 1995-02-14 | 1996-08-30 | Nec Corp | プローブカード |
| JPH08304459A (ja) * | 1995-04-28 | 1996-11-22 | Nec Corp | 半導体ウェハ測定治具 |
| JP2004271181A (ja) * | 2003-03-04 | 2004-09-30 | Murata Mfg Co Ltd | 電子部品検査装置及び検査方法 |
-
1985
- 1985-04-27 JP JP6348285U patent/JPS61179747U/ja active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6414936A (en) * | 1987-07-08 | 1989-01-19 | Tokyo Electron Ltd | Inspecting apparatus |
| JPH0348171A (ja) * | 1989-07-17 | 1991-03-01 | Mitsubishi Materials Corp | 混成集積回路板の電気的特性検査を行う方法 |
| JPH03120474A (ja) * | 1989-10-02 | 1991-05-22 | Nippon Denshi Zairyo Kk | プローブカード |
| JPH03158765A (ja) * | 1989-11-16 | 1991-07-08 | Nippon Denshi Zairyo Kk | プローブカード |
| JPH08220138A (ja) * | 1995-02-14 | 1996-08-30 | Nec Corp | プローブカード |
| JPH08304459A (ja) * | 1995-04-28 | 1996-11-22 | Nec Corp | 半導体ウェハ測定治具 |
| JP2004271181A (ja) * | 2003-03-04 | 2004-09-30 | Murata Mfg Co Ltd | 電子部品検査装置及び検査方法 |
