JPS61179745U - - Google Patents

Info

Publication number
JPS61179745U
JPS61179745U JP6437485U JP6437485U JPS61179745U JP S61179745 U JPS61179745 U JP S61179745U JP 6437485 U JP6437485 U JP 6437485U JP 6437485 U JP6437485 U JP 6437485U JP S61179745 U JPS61179745 U JP S61179745U
Authority
JP
Japan
Prior art keywords
substrate holder
section
shutter
holder part
cathode section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6437485U
Other languages
English (en)
Japanese (ja)
Other versions
JPH047183Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6437485U priority Critical patent/JPH047183Y2/ja
Publication of JPS61179745U publication Critical patent/JPS61179745U/ja
Application granted granted Critical
Publication of JPH047183Y2 publication Critical patent/JPH047183Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP6437485U 1985-04-30 1985-04-30 Expired JPH047183Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6437485U JPH047183Y2 (enrdf_load_stackoverflow) 1985-04-30 1985-04-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6437485U JPH047183Y2 (enrdf_load_stackoverflow) 1985-04-30 1985-04-30

Publications (2)

Publication Number Publication Date
JPS61179745U true JPS61179745U (enrdf_load_stackoverflow) 1986-11-10
JPH047183Y2 JPH047183Y2 (enrdf_load_stackoverflow) 1992-02-26

Family

ID=30595400

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6437485U Expired JPH047183Y2 (enrdf_load_stackoverflow) 1985-04-30 1985-04-30

Country Status (1)

Country Link
JP (1) JPH047183Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH047183Y2 (enrdf_load_stackoverflow) 1992-02-26

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