JPS61179740U - - Google Patents
Info
- Publication number
- JPS61179740U JPS61179740U JP6242485U JP6242485U JPS61179740U JP S61179740 U JPS61179740 U JP S61179740U JP 6242485 U JP6242485 U JP 6242485U JP 6242485 U JP6242485 U JP 6242485U JP S61179740 U JPS61179740 U JP S61179740U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- cover
- exhaust port
- peripheral wall
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6242485U JPS61179740U (enExample) | 1985-04-25 | 1985-04-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6242485U JPS61179740U (enExample) | 1985-04-25 | 1985-04-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61179740U true JPS61179740U (enExample) | 1986-11-10 |
Family
ID=30591625
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6242485U Pending JPS61179740U (enExample) | 1985-04-25 | 1985-04-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61179740U (enExample) |
-
1985
- 1985-04-25 JP JP6242485U patent/JPS61179740U/ja active Pending