JPS61178667U - - Google Patents
Info
- Publication number
- JPS61178667U JPS61178667U JP1985061342U JP6134285U JPS61178667U JP S61178667 U JPS61178667 U JP S61178667U JP 1985061342 U JP1985061342 U JP 1985061342U JP 6134285 U JP6134285 U JP 6134285U JP S61178667 U JPS61178667 U JP S61178667U
- Authority
- JP
- Japan
- Prior art keywords
- supply
- grinding fluid
- recovery
- path
- passage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims description 11
- 238000011084 recovery Methods 0.000 claims description 11
- 238000000746 purification Methods 0.000 claims description 4
- 239000010802 sludge Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985061342U JPS6317649Y2 (enExample) | 1985-04-24 | 1985-04-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985061342U JPS6317649Y2 (enExample) | 1985-04-24 | 1985-04-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61178667U true JPS61178667U (enExample) | 1986-11-07 |
| JPS6317649Y2 JPS6317649Y2 (enExample) | 1988-05-18 |
Family
ID=30589531
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985061342U Expired JPS6317649Y2 (enExample) | 1985-04-24 | 1985-04-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6317649Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000071173A (ja) * | 1998-08-18 | 2000-03-07 | Air Liquide Electronics Syst | 基板の機械研磨のための研磨懸濁液を送り出す装置 |
-
1985
- 1985-04-24 JP JP1985061342U patent/JPS6317649Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000071173A (ja) * | 1998-08-18 | 2000-03-07 | Air Liquide Electronics Syst | 基板の機械研磨のための研磨懸濁液を送り出す装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6317649Y2 (enExample) | 1988-05-18 |