JPS61176609U - - Google Patents

Info

Publication number
JPS61176609U
JPS61176609U JP5814385U JP5814385U JPS61176609U JP S61176609 U JPS61176609 U JP S61176609U JP 5814385 U JP5814385 U JP 5814385U JP 5814385 U JP5814385 U JP 5814385U JP S61176609 U JPS61176609 U JP S61176609U
Authority
JP
Japan
Prior art keywords
flow rate
thermal expansion
mass flow
control device
control valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5814385U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0749525Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985058143U priority Critical patent/JPH0749525Y2/ja
Publication of JPS61176609U publication Critical patent/JPS61176609U/ja
Application granted granted Critical
Publication of JPH0749525Y2 publication Critical patent/JPH0749525Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Flow Control (AREA)
JP1985058143U 1985-04-17 1985-04-17 質量流量自動制御装置 Expired - Lifetime JPH0749525Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985058143U JPH0749525Y2 (ja) 1985-04-17 1985-04-17 質量流量自動制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985058143U JPH0749525Y2 (ja) 1985-04-17 1985-04-17 質量流量自動制御装置

Publications (2)

Publication Number Publication Date
JPS61176609U true JPS61176609U (US20100056889A1-20100304-C00004.png) 1986-11-04
JPH0749525Y2 JPH0749525Y2 (ja) 1995-11-13

Family

ID=30583367

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985058143U Expired - Lifetime JPH0749525Y2 (ja) 1985-04-17 1985-04-17 質量流量自動制御装置

Country Status (1)

Country Link
JP (1) JPH0749525Y2 (US20100056889A1-20100304-C00004.png)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0994252A (ja) * 1995-09-28 1997-04-08 Nagano Keiki Seisakusho Ltd 腹腔排煙装置
JPH0994251A (ja) * 1995-09-28 1997-04-08 Nagano Keiki Seisakusho Ltd 気腹装置
JP2000066732A (ja) * 1998-08-24 2000-03-03 Tadahiro Omi 流体可変型流量制御装置
JP2001513922A (ja) * 1997-02-11 2001-09-04 エンジニアリング メジャメンツ カンパニー 微小質量流量制御装置および方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57101910A (en) * 1980-12-17 1982-06-24 Fujitsu Ltd Method and device for controlling flow rate of gas
JPS6010312U (ja) * 1983-06-27 1985-01-24 日本電気株式会社 ガス流量調整装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57101910A (en) * 1980-12-17 1982-06-24 Fujitsu Ltd Method and device for controlling flow rate of gas
JPS6010312U (ja) * 1983-06-27 1985-01-24 日本電気株式会社 ガス流量調整装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0994252A (ja) * 1995-09-28 1997-04-08 Nagano Keiki Seisakusho Ltd 腹腔排煙装置
JPH0994251A (ja) * 1995-09-28 1997-04-08 Nagano Keiki Seisakusho Ltd 気腹装置
JP2001513922A (ja) * 1997-02-11 2001-09-04 エンジニアリング メジャメンツ カンパニー 微小質量流量制御装置および方法
JP2000066732A (ja) * 1998-08-24 2000-03-03 Tadahiro Omi 流体可変型流量制御装置

Also Published As

Publication number Publication date
JPH0749525Y2 (ja) 1995-11-13

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