JPS61176554U - - Google Patents
Info
- Publication number
- JPS61176554U JPS61176554U JP13648884U JP13648884U JPS61176554U JP S61176554 U JPS61176554 U JP S61176554U JP 13648884 U JP13648884 U JP 13648884U JP 13648884 U JP13648884 U JP 13648884U JP S61176554 U JPS61176554 U JP S61176554U
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- electrode
- cvd apparatus
- cylindrical
- cylindrical electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Photoreceptors In Electrophotography (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13648884U JPS61176554U ( ) | 1984-09-07 | 1984-09-07 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13648884U JPS61176554U ( ) | 1984-09-07 | 1984-09-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61176554U true JPS61176554U ( ) | 1986-11-04 |
Family
ID=30694944
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13648884U Pending JPS61176554U ( ) | 1984-09-07 | 1984-09-07 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61176554U ( ) |
-
1984
- 1984-09-07 JP JP13648884U patent/JPS61176554U/ja active Pending