JPS61176252U - - Google Patents

Info

Publication number
JPS61176252U
JPS61176252U JP5747585U JP5747585U JPS61176252U JP S61176252 U JPS61176252 U JP S61176252U JP 5747585 U JP5747585 U JP 5747585U JP 5747585 U JP5747585 U JP 5747585U JP S61176252 U JPS61176252 U JP S61176252U
Authority
JP
Japan
Prior art keywords
cooling water
circuit
water pipe
vacuum chamber
baking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5747585U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0248421Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985057475U priority Critical patent/JPH0248421Y2/ja
Publication of JPS61176252U publication Critical patent/JPS61176252U/ja
Application granted granted Critical
Publication of JPH0248421Y2 publication Critical patent/JPH0248421Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Furnace Housings, Linings, Walls, And Ceilings (AREA)
  • Particle Accelerators (AREA)
  • Physical Vapour Deposition (AREA)
JP1985057475U 1985-04-19 1985-04-19 Expired JPH0248421Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985057475U JPH0248421Y2 (enExample) 1985-04-19 1985-04-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985057475U JPH0248421Y2 (enExample) 1985-04-19 1985-04-19

Publications (2)

Publication Number Publication Date
JPS61176252U true JPS61176252U (enExample) 1986-11-04
JPH0248421Y2 JPH0248421Y2 (enExample) 1990-12-19

Family

ID=30582039

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985057475U Expired JPH0248421Y2 (enExample) 1985-04-19 1985-04-19

Country Status (1)

Country Link
JP (1) JPH0248421Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7166166B2 (en) 2002-09-30 2007-01-23 Tokyo Electron Limited Method and apparatus for an improved baffle plate in a plasma processing system

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56149443U (enExample) * 1980-04-07 1981-11-10

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56149443U (enExample) * 1980-04-07 1981-11-10

Also Published As

Publication number Publication date
JPH0248421Y2 (enExample) 1990-12-19

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