JPS61176252U - - Google Patents

Info

Publication number
JPS61176252U
JPS61176252U JP5747585U JP5747585U JPS61176252U JP S61176252 U JPS61176252 U JP S61176252U JP 5747585 U JP5747585 U JP 5747585U JP 5747585 U JP5747585 U JP 5747585U JP S61176252 U JPS61176252 U JP S61176252U
Authority
JP
Japan
Prior art keywords
cooling water
circuit
water pipe
vacuum chamber
baking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5747585U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0248421Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985057475U priority Critical patent/JPH0248421Y2/ja
Publication of JPS61176252U publication Critical patent/JPS61176252U/ja
Application granted granted Critical
Publication of JPH0248421Y2 publication Critical patent/JPH0248421Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Physical Vapour Deposition (AREA)
  • Furnace Housings, Linings, Walls, And Ceilings (AREA)
JP1985057475U 1985-04-19 1985-04-19 Expired JPH0248421Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985057475U JPH0248421Y2 (enrdf_load_stackoverflow) 1985-04-19 1985-04-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985057475U JPH0248421Y2 (enrdf_load_stackoverflow) 1985-04-19 1985-04-19

Publications (2)

Publication Number Publication Date
JPS61176252U true JPS61176252U (enrdf_load_stackoverflow) 1986-11-04
JPH0248421Y2 JPH0248421Y2 (enrdf_load_stackoverflow) 1990-12-19

Family

ID=30582039

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985057475U Expired JPH0248421Y2 (enrdf_load_stackoverflow) 1985-04-19 1985-04-19

Country Status (1)

Country Link
JP (1) JPH0248421Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7166166B2 (en) 2002-09-30 2007-01-23 Tokyo Electron Limited Method and apparatus for an improved baffle plate in a plasma processing system

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56149443U (enrdf_load_stackoverflow) * 1980-04-07 1981-11-10

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56149443U (enrdf_load_stackoverflow) * 1980-04-07 1981-11-10

Also Published As

Publication number Publication date
JPH0248421Y2 (enrdf_load_stackoverflow) 1990-12-19

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