JPS61175639A - 感光性ホワイトフイルム - Google Patents

感光性ホワイトフイルム

Info

Publication number
JPS61175639A
JPS61175639A JP60015578A JP1557885A JPS61175639A JP S61175639 A JPS61175639 A JP S61175639A JP 60015578 A JP60015578 A JP 60015578A JP 1557885 A JP1557885 A JP 1557885A JP S61175639 A JPS61175639 A JP S61175639A
Authority
JP
Japan
Prior art keywords
white
photosensitive
film
resist layer
photosensitive resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60015578A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6362734B2 (OSRAM
Inventor
Kuniaki Kadota
門田　國昭
Norio Yabe
紀雄 矢部
Hisashi Mino
三野　寿
Mokuhei Hashimoto
橋本　杢平
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Kokusaku Pulp Co Ltd
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Sanyo Kokusaku Pulp Co Ltd
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Kokusaku Pulp Co Ltd, Dainippon Screen Manufacturing Co Ltd filed Critical Sanyo Kokusaku Pulp Co Ltd
Priority to JP60015578A priority Critical patent/JPS61175639A/ja
Publication of JPS61175639A publication Critical patent/JPS61175639A/ja
Publication of JPS6362734B2 publication Critical patent/JPS6362734B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials
    • G03F1/56—Organic absorbers, e.g. of photo-resists

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP60015578A 1985-01-31 1985-01-31 感光性ホワイトフイルム Granted JPS61175639A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60015578A JPS61175639A (ja) 1985-01-31 1985-01-31 感光性ホワイトフイルム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60015578A JPS61175639A (ja) 1985-01-31 1985-01-31 感光性ホワイトフイルム

Publications (2)

Publication Number Publication Date
JPS61175639A true JPS61175639A (ja) 1986-08-07
JPS6362734B2 JPS6362734B2 (OSRAM) 1988-12-05

Family

ID=11892608

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60015578A Granted JPS61175639A (ja) 1985-01-31 1985-01-31 感光性ホワイトフイルム

Country Status (1)

Country Link
JP (1) JPS61175639A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01274151A (ja) * 1988-04-27 1989-11-01 Dainippon Printing Co Ltd 着色感光性フイルム及び校正検査方法
EP0373537A1 (en) 1988-12-14 1990-06-20 THE STATE OF JAPAN, as Represented by the DIRECTOR GENERAL of the AGENCY of INDUSTRIAL SCIENCE and TECHNOLOGY Photosensitive poly(vinyl alcohol) derivative

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01274151A (ja) * 1988-04-27 1989-11-01 Dainippon Printing Co Ltd 着色感光性フイルム及び校正検査方法
EP0373537A1 (en) 1988-12-14 1990-06-20 THE STATE OF JAPAN, as Represented by the DIRECTOR GENERAL of the AGENCY of INDUSTRIAL SCIENCE and TECHNOLOGY Photosensitive poly(vinyl alcohol) derivative

Also Published As

Publication number Publication date
JPS6362734B2 (OSRAM) 1988-12-05

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