JPS61174745U - - Google Patents

Info

Publication number

JPS61174745U

JPS61174745U JP6010685U JP6010685U JPS61174745U JP S61174745 U JPS61174745 U JP S61174745U JP 6010685 U JP6010685 U JP 6010685U JP 6010685 U JP6010685 U JP 6010685U JP S61174745 U JPS61174745 U JP S61174745U

Authority

JP

Japan

Prior art keywords

semiconductor device

ion implantation

implantation layer

utility

scope

Prior art date

1985-04-22

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 3
• 238000009792 diffusion process Methods 0.000 claims description 2
• 238000005468 ion implantation Methods 0.000 claims description 2
• 239000004020 conductor Substances 0.000 claims 1
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
• 229910052782 aluminium Inorganic materials 0.000 description 1
• 239000012212 insulator Substances 0.000 description 1
• 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
• 229920005591 polysilicon Polymers 0.000 description 1