JPS61174740U - - Google Patents

Info

Publication number
JPS61174740U
JPS61174740U JP5751685U JP5751685U JPS61174740U JP S61174740 U JPS61174740 U JP S61174740U JP 5751685 U JP5751685 U JP 5751685U JP 5751685 U JP5751685 U JP 5751685U JP S61174740 U JPS61174740 U JP S61174740U
Authority
JP
Japan
Prior art keywords
crucible
heater
thermocouple
beam source
raw material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5751685U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0333059Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985057516U priority Critical patent/JPH0333059Y2/ja
Publication of JPS61174740U publication Critical patent/JPS61174740U/ja
Application granted granted Critical
Publication of JPH0333059Y2 publication Critical patent/JPH0333059Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP1985057516U 1985-04-19 1985-04-19 Expired JPH0333059Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985057516U JPH0333059Y2 (enrdf_load_stackoverflow) 1985-04-19 1985-04-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985057516U JPH0333059Y2 (enrdf_load_stackoverflow) 1985-04-19 1985-04-19

Publications (2)

Publication Number Publication Date
JPS61174740U true JPS61174740U (enrdf_load_stackoverflow) 1986-10-30
JPH0333059Y2 JPH0333059Y2 (enrdf_load_stackoverflow) 1991-07-12

Family

ID=30582120

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985057516U Expired JPH0333059Y2 (enrdf_load_stackoverflow) 1985-04-19 1985-04-19

Country Status (1)

Country Link
JP (1) JPH0333059Y2 (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5725733U (enrdf_load_stackoverflow) * 1980-07-18 1982-02-10
JPS5842224A (ja) * 1981-09-07 1983-03-11 Mitsubishi Electric Corp 真空蒸着用セル

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5725733U (enrdf_load_stackoverflow) * 1980-07-18 1982-02-10
JPS5842224A (ja) * 1981-09-07 1983-03-11 Mitsubishi Electric Corp 真空蒸着用セル

Also Published As

Publication number Publication date
JPH0333059Y2 (enrdf_load_stackoverflow) 1991-07-12

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