JPS61173942U - - Google Patents
Info
- Publication number
- JPS61173942U JPS61173942U JP1985056006U JP5600685U JPS61173942U JP S61173942 U JPS61173942 U JP S61173942U JP 1985056006 U JP1985056006 U JP 1985056006U JP 5600685 U JP5600685 U JP 5600685U JP S61173942 U JPS61173942 U JP S61173942U
- Authority
- JP
- Japan
- Prior art keywords
- support frame
- thin film
- photomask
- notch
- adhesive layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 4
- 239000012790 adhesive layer Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 239000011347 resin Substances 0.000 claims description 2
- 229920005989 resin Polymers 0.000 claims description 2
- 239000010408 film Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000012528 membrane Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985056006U JPS61173942U (es) | 1985-04-15 | 1985-04-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985056006U JPS61173942U (es) | 1985-04-15 | 1985-04-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61173942U true JPS61173942U (es) | 1986-10-29 |
Family
ID=30579210
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985056006U Pending JPS61173942U (es) | 1985-04-15 | 1985-04-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61173942U (es) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001005169A (ja) * | 1999-06-24 | 2001-01-12 | Shin Etsu Chem Co Ltd | ペリクルおよびペリクルの製造方法 |
| JP2021073536A (ja) * | 2017-10-10 | 2021-05-13 | 信越化学工業株式会社 | Ｅｕｖ用ペリクルフレームの通気構造、ｅｕｖ用ペリクル、ｅｕｖ用ペリクル付露光原版、露光方法、半導体の製造方法及び液晶ディスプレイの製造方法 |
-
1985
- 1985-04-15 JP JP1985056006U patent/JPS61173942U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001005169A (ja) * | 1999-06-24 | 2001-01-12 | Shin Etsu Chem Co Ltd | ペリクルおよびペリクルの製造方法 |
| JP2021073536A (ja) * | 2017-10-10 | 2021-05-13 | 信越化学工業株式会社 | Ｅｕｖ用ペリクルフレームの通気構造、ｅｕｖ用ペリクル、ｅｕｖ用ペリクル付露光原版、露光方法、半導体の製造方法及び液晶ディスプレイの製造方法 |