JPS61173941U - - Google Patents

Info

Publication number
JPS61173941U
JPS61173941U JP5544085U JP5544085U JPS61173941U JP S61173941 U JPS61173941 U JP S61173941U JP 5544085 U JP5544085 U JP 5544085U JP 5544085 U JP5544085 U JP 5544085U JP S61173941 U JPS61173941 U JP S61173941U
Authority
JP
Japan
Prior art keywords
head
mask substrate
resist
resist coating
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5544085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5544085U priority Critical patent/JPS61173941U/ja
Publication of JPS61173941U publication Critical patent/JPS61173941U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP5544085U 1985-04-16 1985-04-16 Pending JPS61173941U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5544085U JPS61173941U (enrdf_load_stackoverflow) 1985-04-16 1985-04-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5544085U JPS61173941U (enrdf_load_stackoverflow) 1985-04-16 1985-04-16

Publications (1)

Publication Number Publication Date
JPS61173941U true JPS61173941U (enrdf_load_stackoverflow) 1986-10-29

Family

ID=30578117

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5544085U Pending JPS61173941U (enrdf_load_stackoverflow) 1985-04-16 1985-04-16

Country Status (1)

Country Link
JP (1) JPS61173941U (enrdf_load_stackoverflow)

Similar Documents

Publication Publication Date Title
JPS61173941U (enrdf_load_stackoverflow)
JPS6112653U (ja) バキユ−ムチヤツク
JPS6155336U (enrdf_load_stackoverflow)
JPH0279022U (enrdf_load_stackoverflow)
JPH0334064U (enrdf_load_stackoverflow)
JPH02135140U (enrdf_load_stackoverflow)
JPS6332781U (enrdf_load_stackoverflow)
JPH0398447U (enrdf_load_stackoverflow)
JPH0379479U (enrdf_load_stackoverflow)
JPS62190339U (enrdf_load_stackoverflow)
JPH0456749U (enrdf_load_stackoverflow)
JPH03112928U (enrdf_load_stackoverflow)
JPS6213628U (enrdf_load_stackoverflow)
JPS6236531U (enrdf_load_stackoverflow)
JPS6445840U (enrdf_load_stackoverflow)
JPH0350786U (enrdf_load_stackoverflow)
JPS6433743U (enrdf_load_stackoverflow)
JPH0373428U (enrdf_load_stackoverflow)
JPH02125327U (enrdf_load_stackoverflow)
JPH0486165U (enrdf_load_stackoverflow)
JPH0289833U (enrdf_load_stackoverflow)
JPS62199745U (enrdf_load_stackoverflow)
JPH0221651U (enrdf_load_stackoverflow)
JPS60193552U (ja) レジスト現像装置
JPH0362352U (enrdf_load_stackoverflow)