JPS61173872U - - Google Patents
Info
- Publication number
- JPS61173872U JPS61173872U JP5877485U JP5877485U JPS61173872U JP S61173872 U JPS61173872 U JP S61173872U JP 5877485 U JP5877485 U JP 5877485U JP 5877485 U JP5877485 U JP 5877485U JP S61173872 U JPS61173872 U JP S61173872U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- mounting surface
- thin film
- valve seat
- seat surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 4
- 125000006850 spacer group Chemical group 0.000 claims description 2
- 239000012530 fluid Substances 0.000 description 4
- 238000011144 upstream manufacturing Methods 0.000 description 1
Description
第１図は本考案の一実施例に係り、流体ポンプ
の弁装置部分の断面図、第２図および第３図は従
来例に係り、流体ポンプの弁装置部分の断面図で
ある。
１１……流体ポンプ、１２，１３……第１およ
び第２ハウジング、１４……薄膜状弁、１５……
上流側流通路、１６……下流側通流路、１７……
弁座面、１８……流体室、１９……回動支点部、
２０……取付面、２４……スペーサ。
FIG. 1 is a cross-sectional view of a valve device portion of a fluid pump according to an embodiment of the present invention, and FIGS. 2 and 3 are cross-sectional views of a valve device portion of a fluid pump according to a conventional example. 11... Fluid pump, 12, 13... First and second housing, 14... Thin film valve, 15...
Upstream flow path, 16...Downstream flow path, 17...
Valve seat surface, 18...Fluid chamber, 19...Rotation fulcrum part,
20...Mounting surface, 24...Spacer.
Claims (1)
もに、この取付面側で締め付け、前記弁座面側に
延出形成された片持式の薄膜状弁を設け、かつ前
記薄膜状弁の回動支点部より反弁座面側の該薄膜
状弁と取付面との間にスペーサを介装したことを
特徴とする弁装置。 A valve seat surface and a mounting surface are formed on the same plane, and a cantilever type thin film valve is provided which is tightened on the mounting surface side and extends to the valve seat surface side, and the thin film valve is tightened on the mounting surface side. A valve device characterized in that a spacer is interposed between the thin film valve and the mounting surface on the opposite side of the valve seat surface from the rotation fulcrum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5877485U JPS61173872U (en) | 1985-04-18 | 1985-04-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5877485U JPS61173872U (en) | 1985-04-18 | 1985-04-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61173872U true JPS61173872U (en) | 1986-10-29 |
Family
ID=30584593
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5877485U Pending JPS61173872U (en) | 1985-04-18 | 1985-04-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61173872U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012021481A (en) * | 2010-07-15 | 2012-02-02 | Oken Ltd | Diaphragm pump |
| JP2012021482A (en) * | 2010-07-15 | 2012-02-02 | Oken Ltd | Diaphragm pump |
-
1985
- 1985-04-18 JP JP5877485U patent/JPS61173872U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012021481A (en) * | 2010-07-15 | 2012-02-02 | Oken Ltd | Diaphragm pump |
| JP2012021482A (en) * | 2010-07-15 | 2012-02-02 | Oken Ltd | Diaphragm pump |
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