JPS6117280A - Magnetic head - Google Patents

Magnetic head

Info

Publication number
JPS6117280A
JPS6117280A JP13729684A JP13729684A JPS6117280A JP S6117280 A JPS6117280 A JP S6117280A JP 13729684 A JP13729684 A JP 13729684A JP 13729684 A JP13729684 A JP 13729684A JP S6117280 A JPS6117280 A JP S6117280A
Authority
JP
Japan
Prior art keywords
magnetic head
magnetic disk
slider
slider surface
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13729684A
Other languages
Japanese (ja)
Inventor
Akio Tago
田子 章男
Tomoyuki Toshima
戸島 知之
Toshitake Sato
勇武 佐藤
Yasuko Ando
康子 安藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP13729684A priority Critical patent/JPS6117280A/en
Publication of JPS6117280A publication Critical patent/JPS6117280A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/58Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G11B5/60Fluid-dynamic spacing of heads from record-carriers
    • G11B5/6005Specially adapted for spacing from a rotating disc using a fluid cushion
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/187Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
    • G11B5/1871Shaping or contouring of the transducing or guiding surface

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To prevent a magnetic disk from being damaged when starting a rotation of the magnetic disk by forming a slider surface of a magnetic head to a rough surface, so that an attraction of the slider surface of the magnetic head and the magnetic disk is not generated, even if the time when the magnetic disk does not rotate becomes long. CONSTITUTION:A slider surface of a magnetic head is usually finished to a specular surface, but in this case, on the contrary, it is formed to a rough surface. It is difficult to execute etching of the slider surface using hard carbon, by means of a chemical treatment, therefore, the slider surface is formed to a rough surface by executing an ion etching under a mixed atmosphere of argon and oxygen or an oxygen atmosphere. The etching conditions are to use a Kaufmann type 4-inch caliber gun, an accelerating voltage 1kV, a beam current density 1.2mA/cm<2>, and Ar 8X10<-5>Torr+O2 8X10<-5>Torr. In this way, the slider surface of the magnetic head can be formed to a rough surface until the magnetic disk and the slider surface of the magnetic head do not cause an attraction.

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明はコンタクトスタートストップ方式又は接触走行
方式の磁気ディスク用の磁気ヘッドに関するものでアシ
、磁気ディスクと磁気ヘッドのスライダとの吸着を防止
するようにしたものである。
[Detailed Description of the Invention] [Technical Field of the Invention] The present invention relates to a magnetic head for a contact start/stop type magnetic disk or a contact running type magnetic disk. This is what I did.

〔従来技術〕[Prior art]

従来、磁気ヘッドのスライダ面の材料としてはNi  
ZHフェライト、Mn  ZHフェライト、A11I0
3−TiC焼結物または硬質カーボン(グラツシーカー
ボンが用いられ、これらを鏡面仕上げして実用に供して
きた。しかし、装置の高密度記録化に伴い磁気ヘッドが
磁気ディスクから浮上する高さは0.3μm以下にまで
小さくなってきているので、外乱などが発生すると磁気
ヘッドの浮上安定性が損なわれたシ、又はコンタクトス
タートストップ時に磁気ヘッドのスライダ面と磁気ディ
スク面が接触する機会が多くなる。この場合、摩擦係数
の大きい材料や磁気ディスクに比較して著るしく硬度の
大きい材料でスライダ面を構成すると、磁気ディスク面
が摩耗またはヘッドクラッシュをおこす可能性がある。
Conventionally, the material for the slider surface of a magnetic head was Ni.
ZH ferrite, Mn ZH ferrite, A11I0
3-TiC sintered products or hard carbon (glassy carbon) have been used, and these have been mirror-finished and put into practical use.However, as devices become more densely recorded, the height at which the magnetic head flies above the magnetic disk has decreased. As the diameter has become smaller than 0.3 μm, there are many opportunities for the flying stability of the magnetic head to be impaired when disturbances occur, or for the slider surface of the magnetic head to come into contact with the magnetic disk surface during contact start/stop operations. In this case, if the slider surface is made of a material with a large coefficient of friction or a material whose hardness is significantly greater than that of the magnetic disk, there is a possibility that the magnetic disk surface will wear out or a head crash will occur.

例えばフェライトは適度な硬度を有するが摩擦係数が大
きく、ATOs−TiC焼結物は適度な摩擦係数を有す
るが、硬度が大きいのでいずれもスライダ面の材料とし
て適さない。これに対して硬質カーボンは、硬度、摩擦
係数ともに適度な値を有しており、スライダ面の材料と
して適しているので、従来はスライダ面に硬質カーボン
を用い、これを鏡面仕上したものが用いられていた。
For example, ferrite has a moderate hardness but a large friction coefficient, and ATOs-TiC sintered material has a moderate friction coefficient but has a large hardness, so neither of them is suitable as a material for the slider surface. On the other hand, hard carbon has moderate values for both hardness and coefficient of friction, making it suitable as a material for the slider surface. Conventionally, hard carbon was used for the slider surface and mirror-finished material was used. It was getting worse.

しかしながら磁気ディスク面も平滑に仕上げられている
ため、このような従来の磁気ヘッドは磁気ディスクの回
転していない期間が長くなると、磁気ディスク面と磁気
ヘッドのスライダ面との間で吸着をおこし、摩擦係数が
増加する。ディスク媒体面に適度な液体潤滑剤を塗布す
ることによって、第1図の記号1の特性に示すように、
摩擦係数を小さくすることができる。しかし、一般的に
使用される潤滑剤は、摩擦係数が最低となる量よシはる
かに多い量が使用されるので、この場合は潤滑剤による
吸着が生じるので、かえって摩擦係数が増加してしまう
。磁気ディスクと磁気ヘッドの吸着が生じると、磁気デ
ィスクは磁気ヘッドを吸着したまま回転を始めるが、磁
気ヘッドはバネによって駆動系に支持されているのでバ
ネの弾力が吸着力よシも大きく表っ九時に磁気ヘッドが
磁気ディスクから引離されバネの弾力によって引もどさ
れるので、その惰性で磁気ディスクに衝突した時に磁気
ディスク面を損傷させることがある。
However, since the magnetic disk surface is also finished smooth, in such conventional magnetic heads, when the magnetic disk is not rotating for a long time, adhesion occurs between the magnetic disk surface and the slider surface of the magnetic head. The coefficient of friction increases. By applying an appropriate amount of liquid lubricant to the disk medium surface, as shown in the characteristic of symbol 1 in Fig. 1,
The coefficient of friction can be reduced. However, the amount of lubricant that is generally used is much larger than the amount that gives the lowest friction coefficient, so in this case, the lubricant causes adsorption, which actually increases the friction coefficient. . When a magnetic disk and a magnetic head are attracted to each other, the magnetic disk begins to rotate with the magnetic head attached to it, but since the magnetic head is supported by a spring in the drive system, the elasticity of the spring has a large effect on the attraction force. Since the magnetic head is separated from the magnetic disk at nine o'clock and pulled back by the elasticity of the spring, the surface of the magnetic disk may be damaged when it collides with the magnetic disk due to its inertia.

〔発明の目的および構成〕[Object and structure of the invention]

したがってこの発明の目的は、磁気ディスクと磁気ヘッ
ドのスライダ面との吸着を防止するようにした磁気ヘッ
ドを提供することにある。
SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a magnetic head that prevents the magnetic disk from adhering to the slider surface of the magnetic head.

このような目的を達成するためこの発明は、磁気ディス
クと磁気ヘッドのスライダ面とが吸着をおこさなくなる
まで磁気ヘッドスライダ面を粗面化したものである。以
下、この発明の詳細な説明する0 〔実施例〕 磁気へラドスライダ面は通常鏡面仕上されるが、この発
明においては逆に粗面化を行なった。硬質カーボンを用
いたスライダ面のエツチングは化学処理では困難である
ので、ここではアルゴンと酸素の混合雰囲気又は酸素雰
囲気下でイオンエツチングすることによシスライダ面の
粗面化を行った。
In order to achieve this object, the present invention roughens the surface of the slider surface of the magnetic head until the magnetic disk and the slider surface of the magnetic head no longer attract each other. The present invention will be described in detail below.0 [Example] The surface of a magnetic herad slider is usually mirror-finished, but in this invention, it was roughened. Since etching of the slider surface using hard carbon is difficult by chemical treatment, the surface of the slider was roughened by ion etching in a mixed atmosphere of argon and oxygen or in an oxygen atmosphere.

モツチング条件はカウフマン形4インチロ径ガンを用い
、加速電圧IKV、  ビーム電流密度1.2mA/a
d 、Ar8X10  Torr+028X10  T
orrであった。第2図の(b)は上記条件で1時間の
エツチングを施した硬質カーボンスライダ面の粗さ曲線
であり、(e)はエツチングを3時間行った時のスライ
ダ面の粗さ曲線である。また(a)は鏡面仕上げのみの
場合の粗さ曲線である。おのおのの粗さ曲線から最大高
さRmaxは(、)で0:01μm以下、(b)で0.
03 firth 、 (c)で0.04μmである。
Motzing conditions were as follows: Kaufmann type 4-inch diameter gun, acceleration voltage IKV, beam current density 1.2 mA/a.
d, Ar8X10 Torr+028X10T
It was orr. FIG. 2(b) shows the roughness curve of the hard carbon slider surface after etching for 1 hour under the above conditions, and FIG. 2(e) shows the roughness curve of the slider surface after etching for 3 hours. Moreover, (a) is a roughness curve in the case of mirror finishing only. From each roughness curve, the maximum height Rmax is 0:01 μm or less in (,) and 0.01 μm in (b).
03 firth, (c) is 0.04 μm.

第2図の(b) 、 (e)に相当する表面粗さの磁気
へラドスライダの摩擦係数を第1図の記号2,3にそれ
ぞれ示す。このように硬質カーボンスライダの磁気ヘッ
ドの摩擦係数はその表面をイオンビームエツチングによ
シ粗面化したことによシ著るしく低下し、かつ磁気ディ
スク面の液体潤滑剤の量によって変化しなくなる。ここ
で粗面化の吸着に対する効果の現われる最大高さRma
xの下限は潤滑剤塗布量によっても異なるが、Rmax
o、01μm以上で徐々に摩擦係数が低下しはじめるこ
とがら0、01μm以上ということができる。またRm
axの上限については凹凸が均一に加工されている限シ
ヘッドの浮上すきまと同等であっても浮上特性には影響
しないことが確認されている。したがってこの範囲でオ
シ、かつ湿度60%、常温の環境にあるとき、ディスク
媒体と磁気ヘッドスライダ面とが吸着をおこさなくなる
までスライダ面を粗面化すれば、環境条件にかかわらず
摩擦係数が小さくなシ、吸着が発生しない。
The friction coefficients of the magnetic herad slider with the surface roughness corresponding to (b) and (e) in FIG. 2 are shown by symbols 2 and 3 in FIG. 1, respectively. In this way, the coefficient of friction of the magnetic head of a hard carbon slider is significantly reduced by roughening its surface by ion beam etching, and does not change depending on the amount of liquid lubricant on the magnetic disk surface. . Here, the maximum height Rma where the effect of surface roughening on adsorption appears
The lower limit of x varies depending on the amount of lubricant applied, but Rmax
Since the friction coefficient gradually begins to decrease at 0.01 μm or more, it can be said that the friction coefficient is 0.01 μm or more. Also Rm
It has been confirmed that the upper limit of ax does not affect the flying characteristics even if it is equal to the flying clearance of the head as long as the unevenness is uniformly processed. Therefore, if the slider surface is roughened until the disk medium and the magnetic head slider surface no longer attract each other in an environment with humidity of 60% and room temperature within this range, the coefficient of friction will be small regardless of the environmental conditions. No adsorption occurs.

また、潤滑剤塗布量5岬のS S O,保護膜めっきデ
ィスクとイオンビームエツチングでRmaxを0.03
μmとした硬質カーボンスライダをもつ磁気ヘッド(負
荷6gf)を用い、コンタクトスタートストップ試験を
試みたところ、2万回の試験後でもヘッド媒体共損傷は
無く、シかも硬質カーポンス、ライダ面の粗さ曲線は試
験前に比べほとんど変化しなかった。
In addition, Rmax was reduced to 0.03 using SSO with a lubricant application amount of 5, a protective film plated disk, and ion beam etching.
When a contact start/stop test was attempted using a magnetic head (load: 6 gf) with a hard carbon slider of μm diameter, there was no damage to the head medium even after 20,000 tests, and there was no damage to the head or medium due to the hard carbon slider and the roughness of the rider surface. The curve did not change much compared to before the test.

ここにはイオンビームエツチングによる粗面化の例を述
べたが、平行平板形プラズマエツチング等信のイオンエ
ツチングでも同様の粗面化加工が可能である。
Although an example of surface roughening by ion beam etching has been described here, similar surface roughening processing is also possible by ion etching such as parallel plate plasma etching.

〔発明の効果〕〔Effect of the invention〕

以上説明したようにこの発明は、磁気ヘッドのスライダ
面を粗面化したものであるから、磁気デ・イスクの回転
しない時間が長くなっても磁気ヘツドのスライダ面と磁
気ディスクとの吸着が生じないので、磁気ディスクの回
転開始時にその磁気ディスクを損傷させることがないと
いう効果を有する0
As explained above, in this invention, the slider surface of the magnetic head is roughened, so even if the magnetic disk does not rotate for a long time, the slider surface of the magnetic head and the magnetic disk will stick to each other. This has the effect of not damaging the magnetic disk when it starts rotating.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は潤滑剤塗布量と摩擦係数の関係を示すグラフ、
第2図はエツチング条件によるスライダ面の粗さを示す
グラフである。
Figure 1 is a graph showing the relationship between the amount of lubricant applied and the coefficient of friction.
FIG. 2 is a graph showing the roughness of the slider surface depending on etching conditions.

Claims (1)

【特許請求の範囲】[Claims] 磁気ディスクに対しデータの記録、再生を行なうため、
スライダ面に硬質カーボンを使用した磁気ヘッドにおい
て、磁気ディスクの回転開始時に磁気ディスクと磁気ヘ
ッドのスライダ面とが吸着をおこさなくなるまで粗面化
したスライダ面を備えた磁気ヘッド。
To record and reproduce data on magnetic disks,
A magnetic head using hard carbon for the slider surface, which has a slider surface that has been roughened to the point where the magnetic disk and the slider surface of the magnetic head no longer attract each other when the magnetic disk starts rotating.
JP13729684A 1984-07-04 1984-07-04 Magnetic head Pending JPS6117280A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13729684A JPS6117280A (en) 1984-07-04 1984-07-04 Magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13729684A JPS6117280A (en) 1984-07-04 1984-07-04 Magnetic head

Publications (1)

Publication Number Publication Date
JPS6117280A true JPS6117280A (en) 1986-01-25

Family

ID=15195365

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13729684A Pending JPS6117280A (en) 1984-07-04 1984-07-04 Magnetic head

Country Status (1)

Country Link
JP (1) JPS6117280A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0647851A (en) * 1992-07-20 1994-02-22 Sukemasa Nakamoto Decorative laminated sheet
US7965471B2 (en) * 2005-09-06 2011-06-21 Sae Magnetics (H.K.) Ltd. Methods for forming micro-texture on an air bearing surface of a magnetic read/write slider and a magnetic read/write slider with micro-texture

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0647851A (en) * 1992-07-20 1994-02-22 Sukemasa Nakamoto Decorative laminated sheet
US7965471B2 (en) * 2005-09-06 2011-06-21 Sae Magnetics (H.K.) Ltd. Methods for forming micro-texture on an air bearing surface of a magnetic read/write slider and a magnetic read/write slider with micro-texture

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