JPS61171252U - - Google Patents
Info
- Publication number
- JPS61171252U JPS61171252U JP5463485U JP5463485U JPS61171252U JP S61171252 U JPS61171252 U JP S61171252U JP 5463485 U JP5463485 U JP 5463485U JP 5463485 U JP5463485 U JP 5463485U JP S61171252 U JPS61171252 U JP S61171252U
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- stages
- pair
- storage container
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims description 9
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985054634U JPH0648858Y2 (ja) | 1985-04-11 | 1985-04-11 | ウエハ収納容器 |
US06/819,253 US4759681A (en) | 1985-01-22 | 1986-01-16 | End station for an ion implantation apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985054634U JPH0648858Y2 (ja) | 1985-04-11 | 1985-04-11 | ウエハ収納容器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61171252U true JPS61171252U (cs) | 1986-10-24 |
JPH0648858Y2 JPH0648858Y2 (ja) | 1994-12-12 |
Family
ID=30576567
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1985054634U Expired - Lifetime JPH0648858Y2 (ja) | 1985-01-22 | 1985-04-11 | ウエハ収納容器 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0648858Y2 (cs) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01160833U (cs) * | 1988-04-12 | 1989-11-08 | ||
JP2013089845A (ja) * | 2011-10-20 | 2013-05-13 | Disco Abrasive Syst Ltd | ウエーハカセット |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60226134A (ja) * | 1984-04-25 | 1985-11-11 | Hitachi Ltd | 半導体製造装置 |
-
1985
- 1985-04-11 JP JP1985054634U patent/JPH0648858Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60226134A (ja) * | 1984-04-25 | 1985-11-11 | Hitachi Ltd | 半導体製造装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01160833U (cs) * | 1988-04-12 | 1989-11-08 | ||
JP2013089845A (ja) * | 2011-10-20 | 2013-05-13 | Disco Abrasive Syst Ltd | ウエーハカセット |
Also Published As
Publication number | Publication date |
---|---|
JPH0648858Y2 (ja) | 1994-12-12 |
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