JPS61171245U - - Google Patents

Info

Publication number
JPS61171245U
JPS61171245U JP5411285U JP5411285U JPS61171245U JP S61171245 U JPS61171245 U JP S61171245U JP 5411285 U JP5411285 U JP 5411285U JP 5411285 U JP5411285 U JP 5411285U JP S61171245 U JPS61171245 U JP S61171245U
Authority
JP
Japan
Prior art keywords
oxide film
film
plasma cvd
cvd nitride
nitride film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5411285U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5411285U priority Critical patent/JPS61171245U/ja
Publication of JPS61171245U publication Critical patent/JPS61171245U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
JP5411285U 1985-04-11 1985-04-11 Pending JPS61171245U (US06174465-20010116-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5411285U JPS61171245U (US06174465-20010116-C00003.png) 1985-04-11 1985-04-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5411285U JPS61171245U (US06174465-20010116-C00003.png) 1985-04-11 1985-04-11

Publications (1)

Publication Number Publication Date
JPS61171245U true JPS61171245U (US06174465-20010116-C00003.png) 1986-10-24

Family

ID=30575584

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5411285U Pending JPS61171245U (US06174465-20010116-C00003.png) 1985-04-11 1985-04-11

Country Status (1)

Country Link
JP (1) JPS61171245U (US06174465-20010116-C00003.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63164322A (ja) * 1986-12-26 1988-07-07 Nec Corp 半導体装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5617025A (en) * 1979-07-20 1981-02-18 Mitsubishi Electric Corp Semiconductor device
JPS5793530A (en) * 1980-12-03 1982-06-10 Nec Corp Semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5617025A (en) * 1979-07-20 1981-02-18 Mitsubishi Electric Corp Semiconductor device
JPS5793530A (en) * 1980-12-03 1982-06-10 Nec Corp Semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63164322A (ja) * 1986-12-26 1988-07-07 Nec Corp 半導体装置

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