JPS61171242U - - Google Patents

Info

Publication number
JPS61171242U
JPS61171242U JP5395685U JP5395685U JPS61171242U JP S61171242 U JPS61171242 U JP S61171242U JP 5395685 U JP5395685 U JP 5395685U JP 5395685 U JP5395685 U JP 5395685U JP S61171242 U JPS61171242 U JP S61171242U
Authority
JP
Japan
Prior art keywords
wafer
pockets
susceptor
barrel
type epitaxial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5395685U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5395685U priority Critical patent/JPS61171242U/ja
Publication of JPS61171242U publication Critical patent/JPS61171242U/ja
Pending legal-status Critical Current

Links

JP5395685U 1985-04-11 1985-04-11 Pending JPS61171242U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5395685U JPS61171242U (zh) 1985-04-11 1985-04-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5395685U JPS61171242U (zh) 1985-04-11 1985-04-11

Publications (1)

Publication Number Publication Date
JPS61171242U true JPS61171242U (zh) 1986-10-24

Family

ID=30575292

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5395685U Pending JPS61171242U (zh) 1985-04-11 1985-04-11

Country Status (1)

Country Link
JP (1) JPS61171242U (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011508455A (ja) * 2007-12-27 2011-03-10 エムイーエムシー・エレクトロニック・マテリアルズ・インコーポレイテッド 改善された膜厚均一性を有するエピタキシャルバレルサセプタ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5599719A (en) * 1979-01-26 1980-07-30 Hitachi Ltd Heat treatment jig of wafer
JPS57188341A (en) * 1981-12-30 1982-11-19 Yokohama Rubber Co Ltd:The Molding method for green tire

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5599719A (en) * 1979-01-26 1980-07-30 Hitachi Ltd Heat treatment jig of wafer
JPS57188341A (en) * 1981-12-30 1982-11-19 Yokohama Rubber Co Ltd:The Molding method for green tire

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011508455A (ja) * 2007-12-27 2011-03-10 エムイーエムシー・エレクトロニック・マテリアルズ・インコーポレイテッド 改善された膜厚均一性を有するエピタキシャルバレルサセプタ

Similar Documents

Publication Publication Date Title
JPS61171242U (zh)
USD243986S (en) Base support
JPS6142833U (ja) 半導体製造装置用ウエハ保持具
JPS63181335U (zh)
JPS6226034U (zh)
JPS63124164U (zh)
JPS5851911U (ja) スタンド付携帯用電気ドリル
JPS6352477U (zh)
JPS583723U (ja) コ−ド插通孔のキヤツプ
JPS62121346U (zh)
JPS61174479U (zh)
JPS61146540U (zh)
JPS6083467U (ja) 植木鉢受け
JPS62203421U (zh)
JPS61188199U (zh)
JPS6134225U (ja) 枕状の座部
JPS63127301U (zh)
JPH02142206U (zh)
JPS6385646U (zh)
JPS6255001U (zh)
JPS6191582U (zh)
JPS58104906U (ja) 長孔測定装置
JPS6355586U (zh)
JPH0248802U (zh)
JPS5831873U (ja) 花立て