JPS61171242U - - Google Patents

Info

Publication number
JPS61171242U
JPS61171242U JP5395685U JP5395685U JPS61171242U JP S61171242 U JPS61171242 U JP S61171242U JP 5395685 U JP5395685 U JP 5395685U JP 5395685 U JP5395685 U JP 5395685U JP S61171242 U JPS61171242 U JP S61171242U
Authority
JP
Japan
Prior art keywords
wafer
pockets
susceptor
barrel
type epitaxial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5395685U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5395685U priority Critical patent/JPS61171242U/ja
Publication of JPS61171242U publication Critical patent/JPS61171242U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案に係るエピタキシヤル装置のサ
セプタの正面図、第２図はその断面図である。第
３図は従来のサセプタの説明図、第４図はサセプ
タの試作品の説明図である。 １０…サセプタ、１２…ウエハーポケツト、１
４…突出端、２０…サセプタ、２２…透孔、２４
…切欠き、２６，２６ａ，２６ｂ，２６ｃ…ウエ
ハーポケツト、２７…突出端、２８…オリフラー
部、３０…支持片。 FIG. 1 is a front view of a susceptor of an epitaxial device according to the present invention, and FIG. 2 is a sectional view thereof. FIG. 3 is an explanatory diagram of a conventional susceptor, and FIG. 4 is an explanatory diagram of a prototype susceptor. 10...Susceptor, 12...Wafer pocket, 1
4...Protruding end, 20...Susceptor, 22...Through hole, 24
...Notch, 26, 26a, 26b, 26c...Wafer pocket, 27...Protruding end, 28...Orifler part, 30...Support piece.

Claims (1)

【実用新案登録請求の範囲】 ウエハーをほぼ垂直状態に支持して収納するウ
エハーポケツトが縦方向に複数個凹設されている
バレル型エピタキシヤル装置のサセプタにおいて
、 前記サセプタは、その複数個のウエハーポケツ
トが、隣接するウエハーポケツト同士の端部が所
定範囲に亘つて重なるように凹設され、該重なる
ことによつて形成されるウエハーポケツトのくび
れ部に、ウエハーポケツトに収納されるウエハー
の下部を支持する支持片が突設されて成るバレル
型エピタキシヤル装置のサセプタ。[Claims for Utility Model Registration] A susceptor for a barrel-type epitaxial apparatus having a plurality of vertically recessed wafer pockets for supporting and storing wafers in a substantially vertical state, The pockets are recessed so that the ends of adjacent wafer pockets overlap over a predetermined range, and the lower part of the wafer to be stored in the wafer pocket is inserted into the constriction of the wafer pocket formed by the overlap. A susceptor for a barrel-type epitaxial device comprising a protruding support piece.
JP5395685U 1985-04-11 1985-04-11 Pending JPS61171242U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5395685U JPS61171242U (en) 1985-04-11 1985-04-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5395685U JPS61171242U (en) 1985-04-11 1985-04-11

Publications (1)

Publication Number Publication Date
JPS61171242U true JPS61171242U (en) 1986-10-24

Family

ID=30575292

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5395685U Pending JPS61171242U (en) 1985-04-11 1985-04-11

Country Status (1)

Country Link
JP (1) JPS61171242U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011508455A (en) * 2007-12-27 2011-03-10 エムイーエムシー・エレクトロニック・マテリアルズ・インコーポレイテッド Epitaxial barrel susceptor with improved film thickness uniformity

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5599719A (en) * 1979-01-26 1980-07-30 Hitachi Ltd Heat treatment jig of wafer
JPS57188341A (en) * 1981-12-30 1982-11-19 Yokohama Rubber Co Ltd:The Molding method for green tire

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5599719A (en) * 1979-01-26 1980-07-30 Hitachi Ltd Heat treatment jig of wafer
JPS57188341A (en) * 1981-12-30 1982-11-19 Yokohama Rubber Co Ltd:The Molding method for green tire

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011508455A (en) * 2007-12-27 2011-03-10 エムイーエムシー・エレクトロニック・マテリアルズ・インコーポレイテッド Epitaxial barrel susceptor with improved film thickness uniformity

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