JPS61171242U - - Google Patents
Info
- Publication number
- JPS61171242U JPS61171242U JP5395685U JP5395685U JPS61171242U JP S61171242 U JPS61171242 U JP S61171242U JP 5395685 U JP5395685 U JP 5395685U JP 5395685 U JP5395685 U JP 5395685U JP S61171242 U JPS61171242 U JP S61171242U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- pockets
- susceptor
- barrel
- type epitaxial
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5395685U JPS61171242U (enExample) | 1985-04-11 | 1985-04-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5395685U JPS61171242U (enExample) | 1985-04-11 | 1985-04-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61171242U true JPS61171242U (enExample) | 1986-10-24 |
Family
ID=30575292
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5395685U Pending JPS61171242U (enExample) | 1985-04-11 | 1985-04-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61171242U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011508455A (ja) * | 2007-12-27 | 2011-03-10 | エムイーエムシー・エレクトロニック・マテリアルズ・インコーポレイテッド | 改善された膜厚均一性を有するエピタキシャルバレルサセプタ |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5599719A (en) * | 1979-01-26 | 1980-07-30 | Hitachi Ltd | Heat treatment jig of wafer |
| JPS57188341A (en) * | 1981-12-30 | 1982-11-19 | Yokohama Rubber Co Ltd:The | Molding method for green tire |
-
1985
- 1985-04-11 JP JP5395685U patent/JPS61171242U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5599719A (en) * | 1979-01-26 | 1980-07-30 | Hitachi Ltd | Heat treatment jig of wafer |
| JPS57188341A (en) * | 1981-12-30 | 1982-11-19 | Yokohama Rubber Co Ltd:The | Molding method for green tire |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011508455A (ja) * | 2007-12-27 | 2011-03-10 | エムイーエムシー・エレクトロニック・マテリアルズ・インコーポレイテッド | 改善された膜厚均一性を有するエピタキシャルバレルサセプタ |