JPS61171047U - - Google Patents
Info
- Publication number
- JPS61171047U JPS61171047U JP1985053931U JP5393185U JPS61171047U JP S61171047 U JPS61171047 U JP S61171047U JP 1985053931 U JP1985053931 U JP 1985053931U JP 5393185 U JP5393185 U JP 5393185U JP S61171047 U JPS61171047 U JP S61171047U
- Authority
- JP
- Japan
- Prior art keywords
- reticle
- pellicle
- frames
- lower surfaces
- magnetic material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000696 magnetic material Substances 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
- 230000001681 protective effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985053931U JPS61171047U (th) | 1985-04-10 | 1985-04-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985053931U JPS61171047U (th) | 1985-04-10 | 1985-04-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61171047U true JPS61171047U (th) | 1986-10-23 |
Family
ID=30575246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985053931U Pending JPS61171047U (th) | 1985-04-10 | 1985-04-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61171047U (th) |
-
1985
- 1985-04-10 JP JP1985053931U patent/JPS61171047U/ja active Pending