JPH0219146U - - Google Patents
Info
- Publication number
- JPH0219146U JPH0219146U JP9721688U JP9721688U JPH0219146U JP H0219146 U JPH0219146 U JP H0219146U JP 9721688 U JP9721688 U JP 9721688U JP 9721688 U JP9721688 U JP 9721688U JP H0219146 U JPH0219146 U JP H0219146U
- Authority
- JP
- Japan
- Prior art keywords
- support frame
- protective film
- photomask
- protection device
- transparent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001681 protective effect Effects 0.000 claims description 3
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9721688U JPH0219146U (th) | 1988-07-22 | 1988-07-22 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9721688U JPH0219146U (th) | 1988-07-22 | 1988-07-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0219146U true JPH0219146U (th) | 1990-02-08 |
Family
ID=31322493
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9721688U Pending JPH0219146U (th) | 1988-07-22 | 1988-07-22 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0219146U (th) |
-
1988
- 1988-07-22 JP JP9721688U patent/JPH0219146U/ja active Pending