JPS61170066U - - Google Patents

Info

Publication number
JPS61170066U
JPS61170066U JP5295885U JP5295885U JPS61170066U JP S61170066 U JPS61170066 U JP S61170066U JP 5295885 U JP5295885 U JP 5295885U JP 5295885 U JP5295885 U JP 5295885U JP S61170066 U JPS61170066 U JP S61170066U
Authority
JP
Japan
Prior art keywords
nozzle
gas
spraying
chamber
gas injection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5295885U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5295885U priority Critical patent/JPS61170066U/ja
Publication of JPS61170066U publication Critical patent/JPS61170066U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
JP5295885U 1985-04-10 1985-04-10 Pending JPS61170066U (US20020051482A1-20020502-M00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5295885U JPS61170066U (US20020051482A1-20020502-M00012.png) 1985-04-10 1985-04-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5295885U JPS61170066U (US20020051482A1-20020502-M00012.png) 1985-04-10 1985-04-10

Publications (1)

Publication Number Publication Date
JPS61170066U true JPS61170066U (US20020051482A1-20020502-M00012.png) 1986-10-22

Family

ID=30573375

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5295885U Pending JPS61170066U (US20020051482A1-20020502-M00012.png) 1985-04-10 1985-04-10

Country Status (1)

Country Link
JP (1) JPS61170066U (US20020051482A1-20020502-M00012.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021043093A (ja) * 2019-09-12 2021-03-18 株式会社島津製作所 試料前処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021043093A (ja) * 2019-09-12 2021-03-18 株式会社島津製作所 試料前処理装置

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