JPS61169323U - - Google Patents
Info
- Publication number
- JPS61169323U JPS61169323U JP4993085U JP4993085U JPS61169323U JP S61169323 U JPS61169323 U JP S61169323U JP 4993085 U JP4993085 U JP 4993085U JP 4993085 U JP4993085 U JP 4993085U JP S61169323 U JPS61169323 U JP S61169323U
- Authority
- JP
- Japan
- Prior art keywords
- clean chamber
- air conditioning
- utility
- scope
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004378 air conditioning Methods 0.000 claims description 2
- 238000009423 ventilation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
- Control Of Temperature (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4993085U JPS61169323U (sr) | 1985-04-05 | 1985-04-05 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4993085U JPS61169323U (sr) | 1985-04-05 | 1985-04-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61169323U true JPS61169323U (sr) | 1986-10-21 |
Family
ID=30567575
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4993085U Pending JPS61169323U (sr) | 1985-04-05 | 1985-04-05 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61169323U (sr) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01238664A (ja) * | 1988-03-18 | 1989-09-22 | Toppan Printing Co Ltd | 現像処理機構を有する処理装置 |
JP4718909B2 (ja) * | 2005-06-15 | 2011-07-06 | 株式会社岡村製作所 | 換気機能を備えるブース |
-
1985
- 1985-04-05 JP JP4993085U patent/JPS61169323U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01238664A (ja) * | 1988-03-18 | 1989-09-22 | Toppan Printing Co Ltd | 現像処理機構を有する処理装置 |
JP4718909B2 (ja) * | 2005-06-15 | 2011-07-06 | 株式会社岡村製作所 | 換気機能を備えるブース |