JPS61169323U - - Google Patents
Info
- Publication number
- JPS61169323U JPS61169323U JP4993085U JP4993085U JPS61169323U JP S61169323 U JPS61169323 U JP S61169323U JP 4993085 U JP4993085 U JP 4993085U JP 4993085 U JP4993085 U JP 4993085U JP S61169323 U JPS61169323 U JP S61169323U
- Authority
- JP
- Japan
- Prior art keywords
- clean chamber
- air conditioning
- utility
- scope
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004378 air conditioning Methods 0.000 claims description 2
- 238000009423 ventilation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Control Of Temperature (AREA)
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Description
第１図、第２図は従来技術の一例を示す構成図
、第３図は本考案の一実施例を示す構成図、第４
図は第３図の一部を示す平面図である。
１……精密機器、２……チヤンバ、３……温調
器、４……外壁、５……フイルタ、６……リター
ンダクト、７……整風板。
Figures 1 and 2 are block diagrams showing an example of the prior art, Figure 3 is a block diagram showing an embodiment of the present invention, and Figure 4 is a block diagram showing an example of the prior art.
The figure is a plan view showing a part of FIG. 3. 1... Precision equipment, 2... Chamber, 3... Temperature controller, 4... Outer wall, 5... Filter, 6... Return duct, 7... Air conditioning board.
Claims (1)
リターン側に通気抵抗調整穴を配した整風板を設
置したことを特徴とするクリーンチヤンバ。 In a side flow clean chamber,
A clean chamber characterized by having an air conditioning plate with ventilation resistance adjustment holes installed on the return side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4993085U JPS61169323U (en) | 1985-04-05 | 1985-04-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4993085U JPS61169323U (en) | 1985-04-05 | 1985-04-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61169323U true JPS61169323U (en) | 1986-10-21 |
Family
ID=30567575
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4993085U Pending JPS61169323U (en) | 1985-04-05 | 1985-04-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61169323U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01238664A (en) * | 1988-03-18 | 1989-09-22 | Toppan Printing Co Ltd | Constant-temperature constant-humidity spot chamber |
-
1985
- 1985-04-05 JP JP4993085U patent/JPS61169323U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01238664A (en) * | 1988-03-18 | 1989-09-22 | Toppan Printing Co Ltd | Constant-temperature constant-humidity spot chamber |