JPS61168371U - - Google Patents

Info

Publication number
JPS61168371U
JPS61168371U JP5098985U JP5098985U JPS61168371U JP S61168371 U JPS61168371 U JP S61168371U JP 5098985 U JP5098985 U JP 5098985U JP 5098985 U JP5098985 U JP 5098985U JP S61168371 U JPS61168371 U JP S61168371U
Authority
JP
Japan
Prior art keywords
fixed
spindle
compressor
flow path
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5098985U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0416038Y2 (US06566495-20030520-M00011.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5098985U priority Critical patent/JPH0416038Y2/ja
Publication of JPS61168371U publication Critical patent/JPS61168371U/ja
Application granted granted Critical
Publication of JPH0416038Y2 publication Critical patent/JPH0416038Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Indication Of The Valve Opening Or Closing Status (AREA)
  • Fluid-Driven Valves (AREA)
JP5098985U 1985-04-08 1985-04-08 Expired JPH0416038Y2 (US06566495-20030520-M00011.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5098985U JPH0416038Y2 (US06566495-20030520-M00011.png) 1985-04-08 1985-04-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5098985U JPH0416038Y2 (US06566495-20030520-M00011.png) 1985-04-08 1985-04-08

Publications (2)

Publication Number Publication Date
JPS61168371U true JPS61168371U (US06566495-20030520-M00011.png) 1986-10-18
JPH0416038Y2 JPH0416038Y2 (US06566495-20030520-M00011.png) 1992-04-10

Family

ID=30569636

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5098985U Expired JPH0416038Y2 (US06566495-20030520-M00011.png) 1985-04-08 1985-04-08

Country Status (1)

Country Link
JP (1) JPH0416038Y2 (US06566495-20030520-M00011.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015165144A (ja) * 2014-02-28 2015-09-17 株式会社フジキン ダイヤフラム弁用アクチュエータ及びこのアクチュエータを備えた流体制御器
JP2016151308A (ja) * 2015-02-17 2016-08-22 エスアールエンジニアリング株式会社 開閉弁

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015165144A (ja) * 2014-02-28 2015-09-17 株式会社フジキン ダイヤフラム弁用アクチュエータ及びこのアクチュエータを備えた流体制御器
JP2016151308A (ja) * 2015-02-17 2016-08-22 エスアールエンジニアリング株式会社 開閉弁

Also Published As

Publication number Publication date
JPH0416038Y2 (US06566495-20030520-M00011.png) 1992-04-10

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