JPS61167646U - - Google Patents
Info
- Publication number
- JPS61167646U JPS61167646U JP5068985U JP5068985U JPS61167646U JP S61167646 U JPS61167646 U JP S61167646U JP 5068985 U JP5068985 U JP 5068985U JP 5068985 U JP5068985 U JP 5068985U JP S61167646 U JPS61167646 U JP S61167646U
- Authority
- JP
- Japan
- Prior art keywords
- resist
- nozzle
- dropping
- jetting
- dropping device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002904 solvent Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5068985U JPS61167646U (sv) | 1985-04-05 | 1985-04-05 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5068985U JPS61167646U (sv) | 1985-04-05 | 1985-04-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61167646U true JPS61167646U (sv) | 1986-10-17 |
Family
ID=30569057
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5068985U Pending JPS61167646U (sv) | 1985-04-05 | 1985-04-05 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61167646U (sv) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1989004727A1 (en) * | 1987-11-16 | 1989-06-01 | Nordson Corporation | Method and apparatus for preventing coating of nozzle |
JPH0246730A (ja) * | 1988-08-08 | 1990-02-16 | Nec Corp | 塗布膜形成用ディスペンサ |
-
1985
- 1985-04-05 JP JP5068985U patent/JPS61167646U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1989004727A1 (en) * | 1987-11-16 | 1989-06-01 | Nordson Corporation | Method and apparatus for preventing coating of nozzle |
JPH0246730A (ja) * | 1988-08-08 | 1990-02-16 | Nec Corp | 塗布膜形成用ディスペンサ |