JPS61167646U - - Google Patents
Info
- Publication number
- JPS61167646U JPS61167646U JP5068985U JP5068985U JPS61167646U JP S61167646 U JPS61167646 U JP S61167646U JP 5068985 U JP5068985 U JP 5068985U JP 5068985 U JP5068985 U JP 5068985U JP S61167646 U JPS61167646 U JP S61167646U
- Authority
- JP
- Japan
- Prior art keywords
- resist
- nozzle
- dropping
- jetting
- dropping device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002904 solvent Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Description
第１図は、この考案の一実施例によるレジスト
滴下装置の系統図、第２図乃至第５図は、それぞ
れノズル部の変形例を示す断面図である。
１０……滴下ノズル、１２，２０，２４……パ
イプ、１４……供給制御装置、１６……レジスト
容器、１８，１８Ａ〜１８Ｄ……噴出ノズル、２
２……溶剤容器。
FIG. 1 is a system diagram of a resist dropping device according to an embodiment of this invention, and FIGS. 2 to 5 are sectional views showing modified examples of the nozzle portion, respectively. 10... Dripping nozzle, 12, 20, 24... Pipe, 14... Supply control device, 16... Resist container, 18, 18A to 18D... Ejection nozzle, 2
2...Solvent container.
Claims (1)
たレジスト滴下装置において、 前記レジストの溶剤蒸気を噴出させるための噴
出ノズルを前記滴下ノズルの先端近傍に設けたこ
とを特徴とするレジスト滴下装置。[Claims for Utility Model Registration] A resist dropping device configured to drop resist from a dropping nozzle, characterized in that a jetting nozzle for jetting out solvent vapor of the resist is provided near the tip of the dropping nozzle. Resist dropping device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5068985U JPS61167646U (en) | 1985-04-05 | 1985-04-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5068985U JPS61167646U (en) | 1985-04-05 | 1985-04-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61167646U true JPS61167646U (en) | 1986-10-17 |
Family
ID=30569057
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5068985U Pending JPS61167646U (en) | 1985-04-05 | 1985-04-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61167646U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1989004727A1 (en) * | 1987-11-16 | 1989-06-01 | Nordson Corporation | Method and apparatus for preventing coating of nozzle |
| JPH0246730A (en) * | 1988-08-08 | 1990-02-16 | Nec Corp | Disperser for formation of coat film |
-
1985
- 1985-04-05 JP JP5068985U patent/JPS61167646U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1989004727A1 (en) * | 1987-11-16 | 1989-06-01 | Nordson Corporation | Method and apparatus for preventing coating of nozzle |
| JPH0246730A (en) * | 1988-08-08 | 1990-02-16 | Nec Corp | Disperser for formation of coat film |
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