JPS61166548U - - Google Patents

Info

Publication number

JPS61166548U

JPS61166548U JP4975385U JP4975385U JPS61166548U JP S61166548 U JPS61166548 U JP S61166548U JP 4975385 U JP4975385 U JP 4975385U JP 4975385 U JP4975385 U JP 4975385U JP S61166548 U JPS61166548 U JP S61166548U

Authority

JP

Japan

Prior art keywords

thickness

load resistor

drive transistor

active region

thin film

Prior art date

1985-04-03

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000010409 thin film Substances 0.000 claims description 2
• 239000004065 semiconductor Substances 0.000 claims 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
• 239000010408 film Substances 0.000 description 2
• 229910052681 coesite Inorganic materials 0.000 description 1
• 229910052906 cristobalite Inorganic materials 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 238000004519 manufacturing process Methods 0.000 description 1
• 238000000034 method Methods 0.000 description 1
• 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
• 239000000377 silicon dioxide Substances 0.000 description 1
• 235000012239 silicon dioxide Nutrition 0.000 description 1
• 229910052682 stishovite Inorganic materials 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1
• 229910052905 tridymite Inorganic materials 0.000 description 1

Cited By (1)