JPS61166300A - Piezoelectric speaker - Google Patents
Piezoelectric speakerInfo
- Publication number
- JPS61166300A JPS61166300A JP682785A JP682785A JPS61166300A JP S61166300 A JPS61166300 A JP S61166300A JP 682785 A JP682785 A JP 682785A JP 682785 A JP682785 A JP 682785A JP S61166300 A JPS61166300 A JP S61166300A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- transparent
- transparent electrode
- piezoelectric thin
- speaker
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims abstract description 17
- 239000000758 substrate Substances 0.000 claims abstract description 12
- 238000004544 sputter deposition Methods 0.000 abstract description 6
- 239000010408 film Substances 0.000 abstract description 4
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 abstract description 4
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 abstract description 4
- 229910003437 indium oxide Inorganic materials 0.000 abstract description 3
- 229920000515 polycarbonate Polymers 0.000 abstract description 3
- 239000004417 polycarbonate Substances 0.000 abstract description 3
- 229910001887 tin oxide Inorganic materials 0.000 abstract description 3
- 230000010287 polarization Effects 0.000 abstract description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000005520 electrodynamics Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は電気信号を音響信号に変換する電気信号変換器
の一つであるスピーカに関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a speaker, which is one type of electrical signal converter that converts electrical signals into acoustic signals.
［従来の技術］
従来使用されているスピーカは、はとんどが動電形であ
り、主なものにコーンスピーカ、ドームスピーカ、ホー
ンスピーカ等がある。第３図ないしは第５図に各々のタ
イプのスピーカの構造′を示す。第３図に示すコンスピ
ーカはコーン状の振動板（１）を振動させ、音を直接放
射するようにした形式のスピーカである。第４図に示す
ドームスピーカもドーム状の振動板（３）を振動させる
直接放射形スピーカであるが、振動板面積は小さい。第
５図に示すホーンスピーカは変換効率をよくするために
振動板へホーン（音響管）（４）を結合したスピーカで
ある。[Prior Art] Most conventionally used speakers are electrodynamic type, and the main types include cone speakers, dome speakers, horn speakers, etc. The structure of each type of speaker is shown in FIGS. 3 to 5. The con speaker shown in FIG. 3 is a type of speaker in which a cone-shaped diaphragm (1) vibrates to directly radiate sound. The dome speaker shown in FIG. 4 is also a direct radiation speaker that vibrates a dome-shaped diaphragm (3), but the diaphragm area is small. The horn speaker shown in FIG. 5 is a speaker in which a horn (acoustic tube) (4) is coupled to a diaphragm to improve conversion efficiency.
第３図ないしは第５図においてはいずれもマグネット（
２）が使用されている。In both Figures 3 and 5, magnets (
2) is used.
［発明が解決しようとする問題点］
従来使用されているスピーカは、構造上容積が大きく、
キャビネットに組み込んだとき、占有する空間が広くな
るため、音響機器全体の大きさを小型化する場合に問題
となる。また、多くのスピーカはマグネットを使用して
いるため重く、機器の軽量化０点゛゛お°゛ても問題が
あ６・″従来０゛１スピーカはキャビネットに組み込ん
だとき音圧を □低下させないために、振動部分
が外気と接触する′、ダ
よう配置されなければならず、機器のキャビネット全体
を密閉構造とすることができない。このことは機器の内
部回路等を外部の雰囲気による汚染、破損から守るとい
う点において短所となり、機器の使用場所を限定するも
のである。より広範囲の雰囲気で使用可能な機器にする
ためにはキャビネット全体を密閉構造にする必要がある
。[Problems to be solved by the invention] Conventionally used speakers have a large volume due to their structure.
When incorporated into a cabinet, it occupies a large space, which poses a problem when downsizing the overall size of the audio equipment. In addition, many speakers use magnets, so they are heavy, so even if you try to reduce the weight of the equipment, there is a problem. Therefore, the vibrating parts must be placed in such a way that they come into contact with the outside air, and the entire equipment cabinet cannot be of a sealed structure.This means that the internal circuits of the equipment may be contaminated or damaged by the outside atmosphere. This is a drawback in terms of protection from the environment, and limits where the equipment can be used.In order to make the equipment usable in a wider range of environments, the entire cabinet needs to be of a sealed structure.
最近、透明圧電結晶板を用いた薄型スピーカも提案され
ている（特開昭５６−８００号、特開昭５６−１５２３
９９号）が結晶板を用いているため、大きさが限られ、
使用が時計等の小型機器に限られる。Recently, thin speakers using transparent piezoelectric crystal plates have been proposed (JP-A-56-800, JP-A-56-1523).
No. 99) uses a crystal plate, so the size is limited,
Its use is limited to small devices such as watches.
本発明は上記したような従来の問題点を解決した薄型、
軽量のスピーカを提供することを目的とする。The present invention is a thin type that solves the conventional problems as described above.
The purpose is to provide lightweight speakers.
［問題点を解決するための手段］
本発明の要旨は、両面に電極を有する圧電薄膜を基板の
片側の面の少なくとも一部に設けた圧電形スピーカにあ
る。[Means for Solving the Problems] The gist of the present invention resides in a piezoelectric speaker in which a piezoelectric thin film having electrodes on both sides is provided on at least a portion of one surface of a substrate.
本発明のスピーカは基板上にスパッタリングにより電極
と圧電薄膜が形成されて成り、非常に薄く軽量である。The speaker of the present invention has electrodes and a piezoelectric thin film formed on a substrate by sputtering, and is extremely thin and lightweight.
またスピーカを形成した基板を機器のキャビネットの一
部として使用することができるため、発音素子のスペー
スを省略することができる。本発明において用いられる
基板、電極、および圧電薄膜は、各種の材質のもの、不
透明なものも透明なものも使用することができるが、特
に透明な基板、例えばポリカーボネート、ポリエチレン
テレフタレート等を使用し、透明電極、例えば酸化イン
ジウム（Ｉｎ２０３）、酸化錫（ＳｎＯ２）等を用い、
ＺｎＯ，ＣｄＳ、ＰＬＺＴ等の透明性の圧電薄膜を形成
すると全体として透明なスピーカとなるため、機器の表
示部の窓等とスピーカが兼用できる。以上の点から音響
機器の小型、軽量化に寄与するものである。また本発明
によるスピーカを用いれば、キャビネットの一部として
の機能も兼ねることができることから、密閉型の４ヤビ
ネツトで、かつスピーカの振動部分はキャビネット表面
に露出しているため、音圧は低下しないという機能、構
造をもつ機器の設計が可能となる。Furthermore, since the substrate on which the speaker is formed can be used as part of the cabinet of the device, the space for the sound generating element can be omitted. The substrate, electrode, and piezoelectric thin film used in the present invention can be made of various materials, both opaque and transparent, but in particular, transparent substrates such as polycarbonate, polyethylene terephthalate, etc. are used, Using a transparent electrode such as indium oxide (In203), tin oxide (SnO2), etc.
When a transparent piezoelectric thin film such as ZnO, CdS, or PLZT is formed, the speaker becomes transparent as a whole, so that the speaker can be used as a display window of a device. From the above points, this contributes to making audio equipment smaller and lighter. Furthermore, if the speaker according to the present invention is used, it can also function as a part of the cabinet, so the sound pressure will not drop because it is a closed type four-wall net and the vibrating part of the speaker is exposed on the cabinet surface. It becomes possible to design equipment with the functions and structures described above.
［実施例］
第１図は本発明の圧電形スピーカの一実施例の正面図、
第２図は第１図のスピーカのＡ−Ａ’断面図である。透
明性をもち、比較的高い硬度を有するポリカーボネート
の透明基板（５）の片側前面に酸化インジウム９５％、
酸化錫５％組成の透明導電膜を真空スパッタリングによ
り形成し、透明電極（７）とする。透明導電膜は膜厚２
０００λ、抵抗３０Ω／Ｃゴとした。透明電極上に膜厚
２０７ｔｍのＺｎＯの圧電薄膜（６）をスパッタリング
により形成する。圧電薄膜は圧電薄膜をはさむ透明電極
の接続を防ぐために、透明電極端より０．５ｍｍ程度広
く形成する。さらに圧電薄膜上に透明電極（７）と同様
に透明電極（８）を形成する。透明電極間に直流電圧５
００〜１．Ｇｏｏポルトを１５分間以上印加することに
より分極処理を行ない圧電性を付与する。透明電極に回
路部からの所定の電気信号を印加し、透明基板を振動さ
せることにより１．音声を周囲に伝搬し、スピーカとし
て機能させるこ′と゛ができた。[Example] FIG. 1 is a front view of an example of the piezoelectric speaker of the present invention.
FIG. 2 is a sectional view taken along line AA' of the speaker shown in FIG. 95% indium oxide on the front surface of one side of a polycarbonate transparent substrate (5) that is transparent and has relatively high hardness.
A transparent conductive film containing 5% tin oxide is formed by vacuum sputtering to form a transparent electrode (7). The transparent conductive film has a thickness of 2
000λ, resistance 30Ω/C. A ZnO piezoelectric thin film (6) having a thickness of 207 tm is formed on the transparent electrode by sputtering. The piezoelectric thin film is formed to be about 0.5 mm wider than the ends of the transparent electrodes in order to prevent connection between the transparent electrodes sandwiching the piezoelectric thin film. Furthermore, a transparent electrode (8) is formed on the piezoelectric thin film in the same manner as the transparent electrode (7). DC voltage 5 between transparent electrodes
00-1. By applying Goo Port for 15 minutes or more, polarization treatment is performed and piezoelectricity is imparted. 1. By applying a predetermined electric signal from the circuit section to the transparent electrode and vibrating the transparent substrate. It was possible to transmit sound to the surrounding area and function as a speaker.
［発明の効果］。[Effect of the invention].
本発明のＥｆ：室形スピーカは薄く軽量であるため、音
響機器の小型化、軽量化に適して・、）るだけでなく、
透明性を付与することにより機器つ表示窓を兼ねて使用
することもできる。また、キャビネットの一部または全
体としての機能も兼ねることができるので、密閉形のキ
ャビネットでかつスピーカの振動部分はキャビネット表
面に露出しているた・めに音圧は低下しないという構造
１機能をもつ機器の設計が可能となり、より広範囲の雰
囲気において音響機器の使用が可能となるものである。Since the Ef: chamber type speaker of the present invention is thin and lightweight, it is not only suitable for reducing the size and weight of audio equipment.
By adding transparency, it can also be used as a display window for equipment. In addition, since it can also function as a part of the cabinet or the entire cabinet, the structure's first function is that the sound pressure does not drop because it is a closed cabinet and the vibrating part of the speaker is exposed on the cabinet surface. This makes it possible to design equipment that has the same characteristics, and allows the use of audio equipment in a wider range of environments.
また、スパッタリングにより形成した薄膜で構成するた
め、スピーカの大きさが限定されない等数々の特徴を有
するものである。Furthermore, since it is constructed from a thin film formed by sputtering, it has many features such as the size of the speaker is not limited.
第１図、第２図はそれぞれ本発明の圧電形スピーカの正
面図とＡ−Ａ ′断面図で、第３図はコーンスピーカ、
第４図はドームスピーカ、第５図はホーンスピーカの構
造説明図である。
１．３：振動板 ２：マグネット４：ホーン
５：基板
６：圧電薄膜 ７．８：電極Figures 1 and 2 are a front view and a sectional view along line A-A' of the piezoelectric speaker of the present invention, respectively, and Figure 3 is a cone speaker,
FIG. 4 is a structural explanatory diagram of a dome speaker, and FIG. 5 is a structural diagram of a horn speaker. 1.3: Vibration plate 2: Magnet 4: Horn
5: Substrate 6: Piezoelectric thin film 7.8: Electrode
Claims (2)
少なくとも一部に設けた圧電形スピーカ。(1) A piezoelectric speaker in which a piezoelectric thin film having electrodes on both sides is provided on at least a portion of one surface of a substrate.
において、電極、圧電薄膜、基板がいずれも透明性を有
するものである圧電形スピーカ。(2) The piezoelectric speaker according to claim 1, wherein the electrode, the piezoelectric thin film, and the substrate are all transparent.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP682785A JPS61166300A (en) | 1985-01-18 | 1985-01-18 | Piezoelectric speaker |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP682785A JPS61166300A (en) | 1985-01-18 | 1985-01-18 | Piezoelectric speaker |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61166300A true JPS61166300A (en) | 1986-07-26 |
Family
ID=11649051
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP682785A Pending JPS61166300A (en) | 1985-01-18 | 1985-01-18 | Piezoelectric speaker |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61166300A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH042298A (en) * | 1990-04-18 | 1992-01-07 | Sumitomo Special Metals Co Ltd | Transparent speaker |
| US7995777B2 (en) | 2005-10-03 | 2011-08-09 | Xun Yu | Thin film transparent acoustic transducer |
| WO2012107388A1 (en) * | 2011-02-07 | 2012-08-16 | Deutsches Zentrum für Luft- und Raumfahrt e.V. | Transparent acoustically active device |
-
1985
- 1985-01-18 JP JP682785A patent/JPS61166300A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH042298A (en) * | 1990-04-18 | 1992-01-07 | Sumitomo Special Metals Co Ltd | Transparent speaker |
| US7995777B2 (en) | 2005-10-03 | 2011-08-09 | Xun Yu | Thin film transparent acoustic transducer |
| WO2012107388A1 (en) * | 2011-02-07 | 2012-08-16 | Deutsches Zentrum für Luft- und Raumfahrt e.V. | Transparent acoustically active device |
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