JPS61165948A - マイクロ波放電光源装置 - Google Patents
マイクロ波放電光源装置Info
- Publication number
- JPS61165948A JPS61165948A JP153586A JP153586A JPS61165948A JP S61165948 A JPS61165948 A JP S61165948A JP 153586 A JP153586 A JP 153586A JP 153586 A JP153586 A JP 153586A JP S61165948 A JPS61165948 A JP S61165948A
- Authority
- JP
- Japan
- Prior art keywords
- microwave
- mesh plate
- cavity
- metal mesh
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052751 metal Inorganic materials 0.000 claims description 32
- 239000002184 metal Substances 0.000 claims description 32
- 230000000694 effects Effects 0.000 abstract description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 239000007789 gas Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000005672 electromagnetic field Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000000295 emission spectrum Methods 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 210000004072 lung Anatomy 0.000 description 1
Landscapes
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP153586A JPS61165948A (ja) | 1986-01-08 | 1986-01-08 | マイクロ波放電光源装置 |
| US06/947,915 US4838718A (en) | 1986-01-08 | 1986-12-29 | Printing device |
| US07/294,756 US4904096A (en) | 1986-01-08 | 1989-01-09 | Printing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP153586A JPS61165948A (ja) | 1986-01-08 | 1986-01-08 | マイクロ波放電光源装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61165948A true JPS61165948A (ja) | 1986-07-26 |
| JPS6336081B2 JPS6336081B2 (enrdf_load_stackoverflow) | 1988-07-19 |
Family
ID=11504214
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP153586A Granted JPS61165948A (ja) | 1986-01-08 | 1986-01-08 | マイクロ波放電光源装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61165948A (enrdf_load_stackoverflow) |
-
1986
- 1986-01-08 JP JP153586A patent/JPS61165948A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6336081B2 (enrdf_load_stackoverflow) | 1988-07-19 |
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