JPS61164481U - - Google Patents
Info
- Publication number
- JPS61164481U JPS61164481U JP4105686U JP4105686U JPS61164481U JP S61164481 U JPS61164481 U JP S61164481U JP 4105686 U JP4105686 U JP 4105686U JP 4105686 U JP4105686 U JP 4105686U JP S61164481 U JPS61164481 U JP S61164481U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust
- area
- evacuated
- objects
- detaching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005192 partition Methods 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 239000003638 chemical reducing agent Substances 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986041056U JPS6341588Y2 (enExample) | 1986-03-20 | 1986-03-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986041056U JPS6341588Y2 (enExample) | 1986-03-20 | 1986-03-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61164481U true JPS61164481U (enExample) | 1986-10-13 |
| JPS6341588Y2 JPS6341588Y2 (enExample) | 1988-11-01 |
Family
ID=30550521
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986041056U Expired JPS6341588Y2 (enExample) | 1986-03-20 | 1986-03-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6341588Y2 (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5214911A (en) * | 1975-07-25 | 1977-02-04 | Hitachi Ltd | Exhaust valve |
-
1986
- 1986-03-20 JP JP1986041056U patent/JPS6341588Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5214911A (en) * | 1975-07-25 | 1977-02-04 | Hitachi Ltd | Exhaust valve |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6341588Y2 (enExample) | 1988-11-01 |