JPS61164481U - - Google Patents

Info

Publication number
JPS61164481U
JPS61164481U JP4105686U JP4105686U JPS61164481U JP S61164481 U JPS61164481 U JP S61164481U JP 4105686 U JP4105686 U JP 4105686U JP 4105686 U JP4105686 U JP 4105686U JP S61164481 U JPS61164481 U JP S61164481U
Authority
JP
Japan
Prior art keywords
exhaust
area
evacuated
objects
detaching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4105686U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6341588Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986041056U priority Critical patent/JPS6341588Y2/ja
Publication of JPS61164481U publication Critical patent/JPS61164481U/ja
Application granted granted Critical
Publication of JPS6341588Y2 publication Critical patent/JPS6341588Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP1986041056U 1986-03-20 1986-03-20 Expired JPS6341588Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986041056U JPS6341588Y2 (enrdf_load_stackoverflow) 1986-03-20 1986-03-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986041056U JPS6341588Y2 (enrdf_load_stackoverflow) 1986-03-20 1986-03-20

Publications (2)

Publication Number Publication Date
JPS61164481U true JPS61164481U (enrdf_load_stackoverflow) 1986-10-13
JPS6341588Y2 JPS6341588Y2 (enrdf_load_stackoverflow) 1988-11-01

Family

ID=30550521

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986041056U Expired JPS6341588Y2 (enrdf_load_stackoverflow) 1986-03-20 1986-03-20

Country Status (1)

Country Link
JP (1) JPS6341588Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5214911A (en) * 1975-07-25 1977-02-04 Hitachi Ltd Exhaust valve

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5214911A (en) * 1975-07-25 1977-02-04 Hitachi Ltd Exhaust valve

Also Published As

Publication number Publication date
JPS6341588Y2 (enrdf_load_stackoverflow) 1988-11-01

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