JPS61164027U - - Google Patents
Info
- Publication number
- JPS61164027U JPS61164027U JP4688685U JP4688685U JPS61164027U JP S61164027 U JPS61164027 U JP S61164027U JP 4688685 U JP4688685 U JP 4688685U JP 4688685 U JP4688685 U JP 4688685U JP S61164027 U JPS61164027 U JP S61164027U
- Authority
- JP
- Japan
- Prior art keywords
- processing chamber
- gas supply
- nozzle
- gas
- manufacturing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4688685U JPS61164027U (cs) | 1985-04-01 | 1985-04-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4688685U JPS61164027U (cs) | 1985-04-01 | 1985-04-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61164027U true JPS61164027U (cs) | 1986-10-11 |
Family
ID=30561702
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4688685U Pending JPS61164027U (cs) | 1985-04-01 | 1985-04-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61164027U (cs) |
-
1985
- 1985-04-01 JP JP4688685U patent/JPS61164027U/ja active Pending