JPS61163647U - - Google Patents

Info

Publication number
JPS61163647U
JPS61163647U JP4658985U JP4658985U JPS61163647U JP S61163647 U JPS61163647 U JP S61163647U JP 4658985 U JP4658985 U JP 4658985U JP 4658985 U JP4658985 U JP 4658985U JP S61163647 U JPS61163647 U JP S61163647U
Authority
JP
Japan
Prior art keywords
cooling tank
vacuum pump
recovery
drain
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4658985U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4658985U priority Critical patent/JPS61163647U/ja
Publication of JPS61163647U publication Critical patent/JPS61163647U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Apparatus For Disinfection Or Sterilisation (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP4658985U 1985-03-29 1985-03-29 Pending JPS61163647U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4658985U JPS61163647U (enrdf_load_stackoverflow) 1985-03-29 1985-03-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4658985U JPS61163647U (enrdf_load_stackoverflow) 1985-03-29 1985-03-29

Publications (1)

Publication Number Publication Date
JPS61163647U true JPS61163647U (enrdf_load_stackoverflow) 1986-10-09

Family

ID=30561130

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4658985U Pending JPS61163647U (enrdf_load_stackoverflow) 1985-03-29 1985-03-29

Country Status (1)

Country Link
JP (1) JPS61163647U (enrdf_load_stackoverflow)

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