JPS61163271A - Jig for sputtering apparatus - Google Patents

Abstract

PURPOSE:To prevent the stripping of a deposit on sputtering jigs by using an Al or Al (alloy) plate coated with an oxide film as a material for the jigs. CONSTITUTION:An Al or Al alloy plate coated with an oxide film is used as a material for sputtering jigs such as a mask, a shielding plate and a shutter. The oxide film is formed by spontaneous oxidation or anodic oxidation. A deposit sticks to jigs made of the plate with increased adhesion, stress is relieved, and the deposit is hardly stripped. Accordingly, accidents to the sputtering apparatus and defects of a thin film formed on a substrate can be reduced.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a jig installed in a sputtering apparatus.

[Conventional technology]

Conventionally, this type of jig has been shown in the drawings. In the figure, (1) is a mask, (2) is a target, (3) is a shield plate, (4) is a shutter, and (5) is a base material.

A mask (1), a shield plate (3), and a shutter (41), which are jigs, are coated with a target (
2) Atoms ejected from the atom attach. Target (2)
is a metal material, for example Fe, A7, the base material (5
) is oxidized during replacement, the deposits become brittle and the adhesion strength decreases. Moreover, the target (2) is an oxide, for example, FeO
, A40, a nitride such as 513N4, a carbide such as TiC, and when reactive sputtering is performed even when the target (2) is a metal material, the deposits are similarly brittle and have low adhesion. Although it depends on the substance being deposited, in general, as the thickness of the deposit increases, the internal stress within the film increases, making it easier to peel off.

[Problem that the invention seeks to solve]

By the way, as the material for the conventional mask (1), stainless steel, which is stable, resistant to corrosion, resistant to oxidation, and has high mechanical strength, has generally been used. Therefore, it has poor compatibility with oxides (low adhesion), and the internal stress of the deposits is not relaxed, so there is a problem that the deposits tend to crack and peel off.

When the deposits come off, they become dust and cause defects in the thin film on the base material (5), or short-circuit the target (2) and the shield plate (3), stopping the discharge. There was a point.

This invention was made to solve the above-mentioned problems, and aims to provide a jig that does not peel off even when deposits are deposited.

[Failure to solve the problem]

The jig for a sputtering apparatus of the present invention uses one of an aluminum plate and an aluminum alloy plate covered with an oxide film as the material of the jig to be sputter-coated in the sputtering apparatus.

[For production]

By using an aluminum plate or an aluminum alloy plate covered with an oxide film in the jig for a sputtering apparatus according to the present invention, the adhesion strength of various kimonos is increased, and stress is relaxed and it becomes difficult to peel off.

〔Example〕

Next, an example of oxide film formation will be shown.

Example 1 One of the aluminum plates and aluminum alloy plates, such as aluminum with 4 wt% Mg or aluminum with 3 wt% Mn (in this case aluminum plate), mask (I), Shield plate (31
The ribs processed into the shape of the shutter (4) are immersed in an acid or alkaline solution to remove various stains (uneven oxide film, dust, oil, etc.) that adhered during processing, and then soaked in an organic solvent. Soak in.

Thereafter, it is placed in the air, dried by blowing N2 gas, etc., and then left in the air for about a week.

In this way, an oxide film is naturally formed on the surface.

Example 2 After immersing the plate in an organic solvent in the same manner as in Example 1, an oxide film of several μm, for example 2 μm, is formed on the surface of the board by anodic oxidation. After that, it is taken out into the air and dried by blowing N2 gas.

Table 1 shows a comparison between the jigs obtained in the above examples and jigs made of stainless steel and aluminum that are not covered with an oxide film. In Table 1, the thickness of the peeled film represents the life of the jig. Note that this value shows the value when the target is iron.

Table 1 In the above example, the case was shown in which an aluminum plate covered with an oxide film was used, but the same effect can be obtained when an aluminum alloy plate covered with an oxide film is used.

〔Effect of the invention〕

As described above, according to the present invention, one of an aluminum plate and an aluminum alloy plate covered with an oxide film is used as the material of the jig to be sputter coated in the sputtering apparatus, so that deposits can be removed. This reduces peeling of sputtering equipment, reduces accidents in sputtering equipment, and reduces defects in thin films on substrates, and furthermore, aluminum plates and aluminum alloy plates are cheaper than stainless steel, and have the effect of providing jigs for sputtering equipment that are easier to process.

[Brief explanation of the drawing]

The drawing is a main sectional view of a general sputtering apparatus.

Claims (1)

[Claims] A jig for a sputtering device, characterized in that one of an aluminum plate and an aluminum alloy plate covered with an oxide film is used as the material of the jig to be sputter coated in the sputtering device.