JPS61163164U - - Google Patents
Info
- Publication number
- JPS61163164U JPS61163164U JP3244885U JP3244885U JPS61163164U JP S61163164 U JPS61163164 U JP S61163164U JP 3244885 U JP3244885 U JP 3244885U JP 3244885 U JP3244885 U JP 3244885U JP S61163164 U JPS61163164 U JP S61163164U
- Authority
- JP
- Japan
- Prior art keywords
- piston
- wafer
- spring
- cylinder
- attracted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3244885U JPS61163164U (sh) | 1985-03-06 | 1985-03-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3244885U JPS61163164U (sh) | 1985-03-06 | 1985-03-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61163164U true JPS61163164U (sh) | 1986-10-09 |
Family
ID=30533970
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3244885U Pending JPS61163164U (sh) | 1985-03-06 | 1985-03-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61163164U (sh) |
-
1985
- 1985-03-06 JP JP3244885U patent/JPS61163164U/ja active Pending
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