JPS61162859U - - Google Patents
Info
- Publication number
- JPS61162859U JPS61162859U JP4493285U JP4493285U JPS61162859U JP S61162859 U JPS61162859 U JP S61162859U JP 4493285 U JP4493285 U JP 4493285U JP 4493285 U JP4493285 U JP 4493285U JP S61162859 U JPS61162859 U JP S61162859U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- resist
- spin chuck
- spin
- rotating shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 230000002265 prevention Effects 0.000 claims description 2
- 238000004528 spin coating Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4493285U JPS61162859U (zh) | 1985-03-29 | 1985-03-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4493285U JPS61162859U (zh) | 1985-03-29 | 1985-03-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61162859U true JPS61162859U (zh) | 1986-10-08 |
Family
ID=30557965
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4493285U Pending JPS61162859U (zh) | 1985-03-29 | 1985-03-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61162859U (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS636843A (ja) * | 1986-06-26 | 1988-01-12 | Dainippon Screen Mfg Co Ltd | 基板現像処理方法 |
-
1985
- 1985-03-29 JP JP4493285U patent/JPS61162859U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS636843A (ja) * | 1986-06-26 | 1988-01-12 | Dainippon Screen Mfg Co Ltd | 基板現像処理方法 |
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