JPS61162053U - - Google Patents

Info

Publication number
JPS61162053U
JPS61162053U JP4493985U JP4493985U JPS61162053U JP S61162053 U JPS61162053 U JP S61162053U JP 4493985 U JP4493985 U JP 4493985U JP 4493985 U JP4493985 U JP 4493985U JP S61162053 U JPS61162053 U JP S61162053U
Authority
JP
Japan
Prior art keywords
sample
reference member
pressing
electron beam
beam lithography
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4493985U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4493985U priority Critical patent/JPS61162053U/ja
Publication of JPS61162053U publication Critical patent/JPS61162053U/ja
Pending legal-status Critical Current

Links

JP4493985U 1985-03-29 1985-03-29 Pending JPS61162053U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4493985U JPS61162053U (enrdf_load_stackoverflow) 1985-03-29 1985-03-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4493985U JPS61162053U (enrdf_load_stackoverflow) 1985-03-29 1985-03-29

Publications (1)

Publication Number Publication Date
JPS61162053U true JPS61162053U (enrdf_load_stackoverflow) 1986-10-07

Family

ID=30557979

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4493985U Pending JPS61162053U (enrdf_load_stackoverflow) 1985-03-29 1985-03-29

Country Status (1)

Country Link
JP (1) JPS61162053U (enrdf_load_stackoverflow)

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