JPS61162051U - - Google Patents
Info
- Publication number
- JPS61162051U JPS61162051U JP4321085U JP4321085U JPS61162051U JP S61162051 U JPS61162051 U JP S61162051U JP 4321085 U JP4321085 U JP 4321085U JP 4321085 U JP4321085 U JP 4321085U JP S61162051 U JPS61162051 U JP S61162051U
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- arm
- wafer
- section
- sample detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 4
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4321085U JPS61162051U (es) | 1985-03-27 | 1985-03-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4321085U JPS61162051U (es) | 1985-03-27 | 1985-03-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61162051U true JPS61162051U (es) | 1986-10-07 |
Family
ID=30554669
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4321085U Pending JPS61162051U (es) | 1985-03-27 | 1985-03-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61162051U (es) |
-
1985
- 1985-03-27 JP JP4321085U patent/JPS61162051U/ja active Pending