JPS6116151B2 - - Google Patents
Info
- Publication number
- JPS6116151B2 JPS6116151B2 JP17829580A JP17829580A JPS6116151B2 JP S6116151 B2 JPS6116151 B2 JP S6116151B2 JP 17829580 A JP17829580 A JP 17829580A JP 17829580 A JP17829580 A JP 17829580A JP S6116151 B2 JPS6116151 B2 JP S6116151B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- disk
- hole
- positioning
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005468 ion implantation Methods 0.000 claims description 7
- 239000002245 particle Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 11
- 150000002500 ions Chemical class 0.000 description 9
- 230000007246 mechanism Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 238000003780 insertion Methods 0.000 description 4
- 230000037431 insertion Effects 0.000 description 4
- 238000007664 blowing Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17829580A JPS57101327A (en) | 1980-12-16 | 1980-12-16 | Wafer carrier in ion implanting device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17829580A JPS57101327A (en) | 1980-12-16 | 1980-12-16 | Wafer carrier in ion implanting device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57101327A JPS57101327A (en) | 1982-06-23 |
JPS6116151B2 true JPS6116151B2 (fr) | 1986-04-28 |
Family
ID=16045966
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17829580A Granted JPS57101327A (en) | 1980-12-16 | 1980-12-16 | Wafer carrier in ion implanting device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57101327A (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63188043U (fr) * | 1987-05-26 | 1988-12-01 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2529383A1 (fr) * | 1982-06-24 | 1983-12-30 | Commissariat Energie Atomique | Porte-cible a balayage mecanique utilisable notamment pour l'implantation d'ioris |
JPS6267458U (fr) * | 1985-10-17 | 1987-04-27 | ||
US4941800A (en) * | 1988-10-21 | 1990-07-17 | Tokyo Electron Limited | Transfer apparatus for plate-like member |
-
1980
- 1980-12-16 JP JP17829580A patent/JPS57101327A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63188043U (fr) * | 1987-05-26 | 1988-12-01 |
Also Published As
Publication number | Publication date |
---|---|
JPS57101327A (en) | 1982-06-23 |
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