JPS61159368U - - Google Patents
Info
- Publication number
- JPS61159368U JPS61159368U JP4439185U JP4439185U JPS61159368U JP S61159368 U JPS61159368 U JP S61159368U JP 4439185 U JP4439185 U JP 4439185U JP 4439185 U JP4439185 U JP 4439185U JP S61159368 U JPS61159368 U JP S61159368U
- Authority
- JP
- Japan
- Prior art keywords
- evaporation material
- sample
- vacuum container
- hole
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 3
- 238000010891 electric arc Methods 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 238000000034 method Methods 0.000 description 2
- 101100522758 Pseudomonas aeruginosa (strain ATCC 15692 / DSM 22644 / CIP 104116 / JCM 14847 / LMG 12228 / 1C / PRS 101 / PAO1) pvdA gene Proteins 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4439185U JPS61159368U (zh) | 1985-03-26 | 1985-03-26 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4439185U JPS61159368U (zh) | 1985-03-26 | 1985-03-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61159368U true JPS61159368U (zh) | 1986-10-02 |
Family
ID=30556919
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4439185U Pending JPS61159368U (zh) | 1985-03-26 | 1985-03-26 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61159368U (zh) |
-
1985
- 1985-03-26 JP JP4439185U patent/JPS61159368U/ja active Pending
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