JPS61159368U - - Google Patents
Info
- Publication number
- JPS61159368U JPS61159368U JP1985044391U JP4439185U JPS61159368U JP S61159368 U JPS61159368 U JP S61159368U JP 1985044391 U JP1985044391 U JP 1985044391U JP 4439185 U JP4439185 U JP 4439185U JP S61159368 U JPS61159368 U JP S61159368U
- Authority
- JP
- Japan
- Prior art keywords
- evaporation material
- sample
- vacuum container
- hole
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985044391U JPS61159368U (enExample) | 1985-03-26 | 1985-03-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985044391U JPS61159368U (enExample) | 1985-03-26 | 1985-03-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61159368U true JPS61159368U (enExample) | 1986-10-02 |
Family
ID=30556919
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985044391U Pending JPS61159368U (enExample) | 1985-03-26 | 1985-03-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61159368U (enExample) |
-
1985
- 1985-03-26 JP JP1985044391U patent/JPS61159368U/ja active Pending
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