JPS61158946U - - Google Patents
Info
- Publication number
- JPS61158946U JPS61158946U JP4223885U JP4223885U JPS61158946U JP S61158946 U JPS61158946 U JP S61158946U JP 4223885 U JP4223885 U JP 4223885U JP 4223885 U JP4223885 U JP 4223885U JP S61158946 U JPS61158946 U JP S61158946U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- wafer
- vapor phase
- growth apparatus
- phase growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4223885U JPS61158946U (enExample) | 1985-03-23 | 1985-03-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4223885U JPS61158946U (enExample) | 1985-03-23 | 1985-03-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61158946U true JPS61158946U (enExample) | 1986-10-02 |
Family
ID=30552806
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4223885U Pending JPS61158946U (enExample) | 1985-03-23 | 1985-03-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61158946U (enExample) |
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1985
- 1985-03-23 JP JP4223885U patent/JPS61158946U/ja active Pending