JPS61158453A - Ultraviolet-ray irradiating device - Google Patents

Ultraviolet-ray irradiating device

Info

Publication number
JPS61158453A
JPS61158453A JP27585184A JP27585184A JPS61158453A JP S61158453 A JPS61158453 A JP S61158453A JP 27585184 A JP27585184 A JP 27585184A JP 27585184 A JP27585184 A JP 27585184A JP S61158453 A JPS61158453 A JP S61158453A
Authority
JP
Japan
Prior art keywords
rays
fluid
absorbed
discharge lamp
ultraviolet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP27585184A
Other languages
Japanese (ja)
Inventor
Bunji Iwasaki
岩崎 文次
Nobuo Matsushita
信夫 松下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Electric Equipment Corp
Original Assignee
Toshiba Electric Equipment Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Electric Equipment Corp filed Critical Toshiba Electric Equipment Corp
Priority to JP27585184A priority Critical patent/JPS61158453A/en
Publication of JPS61158453A publication Critical patent/JPS61158453A/en
Pending legal-status Critical Current

Links

Landscapes

  • Supply, Installation And Extraction Of Printed Sheets Or Plates (AREA)
  • Printing Methods (AREA)
  • Coating Apparatus (AREA)
  • Processes Of Treating Macromolecular Substances (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

PURPOSE:To curb the temperature rise of the surface through irradiation with the ultraviolet rays only, with the infrared and visible rays eliminated by providing either the interior or the exterior of the outer tube of a double tubular body with a multi-layer interference film which admits the ultraviolet rays to go therethrough and reflects both the visible and infrared rays. CONSTITUTION:In the embodiment of the present invention, the infrared rays from a high- voltage discharge lamp 1 are absorbed with a fluid W within a double tubular body 2 while they pass therethrough, wherein the visible rays from the high-voltage discharge lamp are reflected from a multi-layer interference film formed on the outside peripheral surface of an outer tube 12 and successively go into the fluid W, within the double tubular body 2, where they are absorbed, further wherein part of the infrared rays passing through the fluid W without being absorbed are also reflected fro the multi-layer interference film 13, likewise with the visible rays, and then go into the fluid W wherein to be absorbed, whereby almost all infrared rays from the high-voltage discharge lamp are absorbed with the fluid within the double tubular body, with the remaining part thereof and the visible rays also absorbed with the fluid within said double tubular body through reflection from the multi-interference film with which the outer tube is provided, thereby it becomes practicable to curb from rising the temperature of the surface under irradiation with the ultraviolet rays almost totally devoid of the visible and infrared rays.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、可視光線および赤外線を除去し紫外線のみを
照射するようにして加熱作用を低減させた紫外線照射装
置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an ultraviolet irradiation device that reduces heating effect by removing visible light and infrared rays and emitting only ultraviolet rays.

〔従来の技術〕[Conventional technology]

プリント合板、プリント配線基板あるいは新聞印刷など
の印刷工程において、紫外線硬化性の塗料、インク等を
塗布した基体に紫外線を照射してこの塗料、インク等を
硬化させる方法が知られている。しかし、このような方
法において、紫外線を放射する例えば高圧水銀ランプ、
メタルハライドランプなどの高圧放電ランプは、紫外線
とともに1可視光線および赤外線も放射するため、この
可視光線および赤外線の照射により塗料、インク等や基
体に高温を加えることになり、その紫外線硬化の光化学
反応を阻害したり、基体を焦損させたりすることがあり
、そのため、一般には被照射面の加熱作用を除く手段が
採用されている。
BACKGROUND ART In printing processes such as printed plywood, printed wiring boards, and newspaper printing, a method is known in which a substrate coated with ultraviolet-curable paint, ink, etc. is irradiated with ultraviolet rays to cure the paint, ink, etc. However, in such a method, e.g. a high-pressure mercury lamp that emits ultraviolet light,
High-pressure discharge lamps such as metal halide lamps emit visible light and infrared rays as well as ultraviolet rays, so irradiation with visible light and infrared rays applies high temperatures to paints, inks, etc. and the substrate, which inhibits the photochemical reaction of UV curing. Therefore, a means to eliminate the heating effect on the irradiated surface is generally adopted.

従来、このような手段は、高圧放電ランプの外周に内管
と外管とを有した二重管体を配置し、この内管と外管と
の間に純水を循環させることにより、高圧放電ランプか
ら放射された赤外線を純水に吸収させて除去し、赤外線
を含まない紫外線を照射するようにした手段がある。
Conventionally, such means have been developed by arranging a double tube body having an inner tube and an outer tube around the outer periphery of a high-pressure discharge lamp, and circulating pure water between the inner tube and the outer tube to generate high pressure. There is a method in which infrared rays emitted from a discharge lamp are absorbed and removed by pure water, and ultraviolet rays that do not contain infrared rays are irradiated.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

上記のような従来の紫外線照射装置では、二重管体内の
純水による吸収作用により赤外線は効果的に除去される
が、高圧放電ランプから放射される水銀のラインスペク
トルの波長435nn、545nn+、578n1等の
可視域を吸収除去する効果は少なく、そのため、紫外線
とともに可視光線が被照射面に照射されてしまい、被照
射面の温度上昇の防止が困難な問題があった。
In the conventional ultraviolet irradiation device as described above, infrared rays are effectively removed by the absorption effect of pure water inside the double tube, but the wavelengths of the line spectrum of mercury emitted from the high-pressure discharge lamp are 435nn, 545nn+, and 578n1. The effect of absorbing and removing visible light such as UV rays is small, and therefore visible light is irradiated onto the irradiated surface along with ultraviolet rays, making it difficult to prevent the temperature of the irradiated surface from rising.

本発明は上述のような問題に鑑みなされたもので、高圧
放電ランプからの赤外域および可視域を除去して紫外域
のみを照射するようにして、被照射面の温度上昇を低減
させる紫外線照射装置を提供することを目的とするもの
である。
The present invention was made in view of the above-mentioned problems, and is an ultraviolet irradiation method that reduces the temperature rise of the irradiated surface by removing the infrared and visible regions from a high-pressure discharge lamp and irradiating only the ultraviolet region. The purpose is to provide a device.

〔問題点を解決するための手段〕[Means for solving problems]

本発明は、高圧放電ランプ1を、紫外線を透過する内管
11および外管12を有しこの内管11および外管12
との間に紫外線を透過する流体Wを循環させた紫外線透
過の二重管体2により囲繞し、この二重管体2の外管1
2の内面および外面の少なくとも一方の面に紫外線を透
過し可視光線および赤外線を反射する多層干渉薄1i1
3を形成した紫外線照射装置である。
The present invention provides a high-pressure discharge lamp 1 having an inner tube 11 and an outer tube 12 that transmit ultraviolet rays.
The outer tube 1 of this double tube body 2 is surrounded by an ultraviolet-transparent double tube body 2 in which a fluid W that transmits ultraviolet rays is circulated between.
A multilayer interference thin film 1i1 that transmits ultraviolet rays and reflects visible rays and infrared rays on at least one of the inner and outer surfaces of 2.
This is an ultraviolet irradiation device formed with No. 3.

〔作用〕[Effect]

本発明は、高圧放電ランプを囲繞した二重管体内の流体
により赤外線を吸収させるとともに、この二重管体の外
管に形成した多層干渉薄膜により可視光線および赤外線
の一部を反射させて二重管体内の流体に吸収させ、紫外
線のみを被照射面に照射するようにしたものである。
The present invention absorbs infrared rays by the fluid inside the double tube surrounding the high pressure discharge lamp, and reflects part of the visible light and infrared rays by a multilayer interference thin film formed on the outer tube of the double tube. The ultraviolet rays are absorbed by the fluid inside the heavy tube and only the ultraviolet rays are irradiated onto the irradiated surface.

〔実施例〕〔Example〕

次に、本発明の一実施例の構成を図面を参照して説明す
る。
Next, the configuration of an embodiment of the present invention will be described with reference to the drawings.

紫外線照射装置は、第1図および第2図に示すように、
管状の高圧放電ランプ1と、この高圧放電ランプを囲繞
する紫外線透過の二重管体2と、この高圧放電ランプ1
および二重管体2に沿って対向配置され前面に向かって
拡開開口した一対の反射体3と、この反射体3を収納保
持し前面を開口して照射開口4を形成した箱状の枠体5
とから構成されている。
As shown in FIGS. 1 and 2, the ultraviolet irradiation device
A tubular high-pressure discharge lamp 1, an ultraviolet-transparent double tube body 2 surrounding this high-pressure discharge lamp, and this high-pressure discharge lamp 1.
and a pair of reflectors 3 that are disposed opposite to each other along the double tube body 2 and have an opening that expands toward the front, and a box-shaped frame that houses and holds the reflectors 3 and has an opening at the front to form an irradiation opening 4. body 5
It is composed of.

上記高圧放電ランプ1は、例えば高圧水銀ランプ、メタ
ルハライドランプ等からなり、この高圧放電ランプ1は
放電により、第3図に示すような水銀のラインスペクト
ルを放射し、紫外域の水銀ラインスペクトルとともに可
視域の水銀ラインスペクトルが放出され、さらに放電お
よび高温の管壁などから赤外線が放射される。なお、こ
の高圧放電ランプ1の放電によって放射するエネルギは
、紫外域が約50%、可視域が約35%、赤外域が約1
5%であり、この放射はそのまま高圧放電ランプ1から
放射され、さらに、管壁などの各部からの二次放射され
た赤外線がこれに加わる。
The high-pressure discharge lamp 1 is composed of, for example, a high-pressure mercury lamp, a metal halide lamp, etc., and when it discharges, it emits a line spectrum of mercury as shown in FIG. The mercury line spectrum in the area is emitted, and infrared rays are also emitted from the discharge and the high-temperature tube wall. The energy emitted by the discharge of this high-pressure discharge lamp 1 is approximately 50% in the ultraviolet region, approximately 35% in the visible region, and approximately 1% in the infrared region.
5%, and this radiation is directly emitted from the high-pressure discharge lamp 1, and furthermore, secondary infrared radiation emitted from various parts such as the tube wall is added to this radiation.

上記二重管体2は、高圧放電ランプ1を囲繞し紫外線を
透過する石英ガラスなどからなる内管11と外管12と
を有し、この内管15と外管16との間に例えば純水、
空気などの紫外線を透過する流体Wが図示しない循環装
置により循環通流される。また、この二重管体2の外管
12の外周面には、例えば酸化チタン(TiOz)、酸
化ジルコニウム(Zr0z )などからなる高屈折率層
と、シリカ(5i02 ) 、フッ化マグネシウム(M
CIFg >などからなる低屈折率層とを10層ないし
60数層交互に重層した多層干渉薄膜13が蒸着形成さ
れている。そして、この二管体2は、流体Wにより、高
圧放電ランプ1から放射される赤外線を吸収して除去す
る。また、多層干渉薄膜13により、第4図に示すよう
に、水銀ラインスペクトルの波長435nm1546n
m、 578nm等(波長405 nlは必要により反
射させる)の可視光線を反射してその反射された可視光
線を二重管体2内の流体Wに吸収させて除去し、また、
波長200〜400 nmの紫外域は透過する。
The double tube body 2 has an inner tube 11 and an outer tube 12 that surround the high-pressure discharge lamp 1 and are made of quartz glass or the like that transmits ultraviolet rays. water,
A fluid W that transmits ultraviolet rays, such as air, is circulated through a circulation device (not shown). Further, on the outer peripheral surface of the outer tube 12 of the double tube body 2, a high refractive index layer made of, for example, titanium oxide (TiOz), zirconium oxide (Zr0z), etc., and a layer of silica (5i02), magnesium fluoride (MgO2), etc.
A multilayer interference thin film 13 is formed by vapor deposition, in which 10 to 60 layers of low refractive index layers such as CIFg> are alternately laminated. The two-tube body 2 uses the fluid W to absorb and remove infrared rays emitted from the high-pressure discharge lamp 1. Furthermore, as shown in FIG.
m, 578 nm, etc. (wavelength 405 nm is reflected as necessary), and the reflected visible light is absorbed by the fluid W in the double tube body 2 and removed,
Ultraviolet wavelengths of 200 to 400 nm are transmitted.

上記反射体3は、例えばアルミニウム等の金属板にて二
次曲面をなすように形成され、高圧放電ランプ1から放
射される光を照射開口3に向かって反射する。
The reflector 3 is formed of a metal plate such as aluminum and has a quadratic curved surface, and reflects the light emitted from the high-pressure discharge lamp 1 toward the irradiation opening 3.

上記枠体5には、その内側部の前端および後端に設けた
固定端部21に反射体3の前後端部が固定されており、
この枠体5および反射体3の後部には枠体5の反射体3
と高圧放電ランプ1とで構成する空所内の空気が吸引装
置により吸引される排気孔22が開口形成されている。
The front and rear ends of the reflector 3 are fixed to the fixed ends 21 provided at the front and rear ends of the inner side of the frame 5,
The reflector 3 of the frame 5 is provided at the rear of the frame 5 and the reflector 3.
An exhaust hole 22 is formed through which the air in the space formed by the high-pressure discharge lamp 1 and the high-pressure discharge lamp 1 is sucked by a suction device.

次に、本実施例の作用を説明する。Next, the operation of this embodiment will be explained.

高圧放電ランプ1の放電とともに、紫外域、可視域およ
び赤外域のスペクトルが放射され、そして、高圧放電ラ
ンプ1から二重管体2を通過する間に、赤外線は二重管
体2内の流体Wに吸収され、また、可視光線は外管12
の外周面に形成した多層干渉薄膜13により流体W内に
反射されてこの二重管体2内の流体Wに吸収される。な
お、流体Wに吸収されずに通過した一部の赤外線は、可
視光線とFi1様に多層干渉薄膜13により反射されて
から流体Wに吸収される。
As the high-pressure discharge lamp 1 discharges, spectra in the ultraviolet, visible and infrared regions are emitted, and while passing from the high-pressure discharge lamp 1 through the double tube body 2, infrared rays are emitted from the fluid inside the double tube body 2. The visible light is absorbed by W, and the visible light is absorbed by the outer tube 12.
It is reflected into the fluid W by the multilayer interference thin film 13 formed on the outer peripheral surface of the double tube body 2, and is absorbed by the fluid W inside the double tube body 2. Note that a part of the infrared rays that has passed through without being absorbed by the fluid W is reflected by the multilayer interference thin film 13 in the same way as visible light rays Fi1, and then absorbed by the fluid W.

このように、高圧放電ランプ1から放射される赤外線は
、二重管体2内の流体Wに吸収されて除去され、また、
可視域の水銀ラインスペクトルも多層干渉薄膜13によ
り反射されて流体Wに吸収除去され、そのため、照射開
口4から直接または反射体3で反射して照射される放射
エネルギは、はとんどが紫外線であり、赤外域および可
視域の水銀ラインスペクトルはほとんど照射されない。
In this way, the infrared rays emitted from the high-pressure discharge lamp 1 are absorbed and removed by the fluid W in the double tube body 2, and
The mercury line spectrum in the visible range is also reflected by the multilayer interference thin film 13 and absorbed and removed by the fluid W. Therefore, the radiant energy irradiated directly from the irradiation aperture 4 or reflected by the reflector 3 is mostly ultraviolet rays. Therefore, the mercury line spectrum in the infrared and visible regions is hardly irradiated.

なお、上記実施例では、二重管体2の外管12の外周面
に多層干渉薄11A13を蒸着形成したが、この多層干
渉薄膜13を外管12の内面に蒸着形成するようにして
もよく、また、この外管12に蒸着する多層干渉薄膜1
3の蒸着形成範囲は、外管12の全面、または、被照射
面の必要範囲に合わせ、例えば被照射物を搬送するコン
ベア幅、設置管理温度条件などにより外管12の一部に
蒸着形成してもよい。
In the above embodiment, the multilayer interference thin film 11A13 is formed by vapor deposition on the outer peripheral surface of the outer tube 12 of the double tube body 2, but the multilayer interference thin film 13 may be formed by vapor deposition on the inner surface of the outer tube 12. , and a multilayer interference thin film 1 deposited on this outer tube 12.
The vapor deposition formation range in step 3 is determined by the entire surface of the outer tube 12 or a part of the outer tube 12 depending on the width of the conveyor for conveying the object to be irradiated, the installation management temperature conditions, etc. It's okay.

ざらに、上記多層干渉簿膜13の膜厚、材質および層数
を変えることにより、この多層干渉薄膜13を透過する
水銀ラインスペクトルの分光透過率を任意に可変するこ
とができる。
Roughly speaking, by changing the film thickness, material, and number of layers of the multilayer interference thin film 13, the spectral transmittance of the mercury line spectrum transmitted through the multilayer interference thin film 13 can be arbitrarily varied.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、高圧放電ランプを流体を循環させた二
重管体で囲繞し、この二重管体の外管の内面および外面
の少なくとも一方の面に多層干渉薄膜を形成したので、
高圧放電ランプからの赤外線は二重管体内の流体により
吸収されて除去され、可視光線および赤外線の一部は外
管に形成した多層干渉薄膜により反射されて二重管体内
の流体に吸収除去されるため、可視光線も赤外線もほと
んど含まない紫外線のみを照射することができ、被照射
面における温度低減が図れ、熱に弱い被照射物にも光硬
化処理を行なうことができ、紫外線硬化の光化学反応を
阻害することがなく確実に行なえ、また、多層干渉薄膜
の膜厚、材質および層数等を変えて分光透過率を可変す
ることにより、必要な水銀ラインスペクトルのみを被照
射面に照射することができるものである。
According to the present invention, a high-pressure discharge lamp is surrounded by a double tube in which fluid is circulated, and a multilayer interference thin film is formed on at least one of the inner and outer surfaces of the outer tube of the double tube.
The infrared rays from the high-pressure discharge lamp are absorbed and removed by the fluid inside the double tube, and part of the visible light and infrared rays are reflected by the multilayer interference thin film formed on the outer tube and absorbed by the fluid inside the double tube. Therefore, it is possible to irradiate only ultraviolet rays that contain almost no visible light or infrared rays, which reduces the temperature of the irradiated surface, and allows photocuring of irradiated objects that are sensitive to heat. It can be carried out reliably without inhibiting the reaction, and by changing the spectral transmittance by changing the thickness, material, number of layers, etc. of the multilayer interference thin film, only the necessary mercury line spectrum can be irradiated onto the irradiated surface. It is something that can be done.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の紫外線照射装置の一実施例を示す縦断
面図、第2図は要部の拡大図、第3図は高圧放電ランプ
の放電発光の一例を示すスペクトル分布図、第4図は多
層干渉薄膜の分光通過率曲線図である。 1・・高圧放電ランプ、2・・二重管体、11・・内管
、12・・外管、13・・多層干渉薄膜、W・・流体。
FIG. 1 is a longitudinal cross-sectional view showing one embodiment of the ultraviolet irradiation device of the present invention, FIG. 2 is an enlarged view of the main parts, FIG. 3 is a spectral distribution diagram showing an example of discharge light emission from a high-pressure discharge lamp, and FIG. The figure is a spectral transmittance curve diagram of a multilayer interference thin film. 1...High pressure discharge lamp, 2...Double tube body, 11...Inner tube, 12...Outer tube, 13...Multilayer interference thin film, W...Fluid.

Claims (1)

【特許請求の範囲】[Claims] (1)高圧放電ランプと、この高圧放電ランプを囲繞し
紫外線を透過する内管および外管を有しこの内管および
外管との間に紫外線を透過する流体を循環させた紫外線
透過の二重管体とからなり、 上記二重管体の外管の内面および外面の少なくとも一方
の面に紫外線を透過し可視光線および赤外線を反射する
多層干渉薄膜を形成したことを特徴とする紫外線照射装
置。
(1) A high-pressure discharge lamp, and an ultraviolet-transmitting double lamp that includes an inner tube and an outer tube that surround the high-pressure discharge lamp and that transmit ultraviolet rays, and a fluid that transmits ultraviolet rays is circulated between the inner tube and the outer tube. An ultraviolet irradiation device comprising a double tube body, and a multilayer interference thin film that transmits ultraviolet rays and reflects visible light and infrared rays is formed on at least one of the inner and outer surfaces of the outer tube of the double tube body. .
JP27585184A 1984-12-29 1984-12-29 Ultraviolet-ray irradiating device Pending JPS61158453A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27585184A JPS61158453A (en) 1984-12-29 1984-12-29 Ultraviolet-ray irradiating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27585184A JPS61158453A (en) 1984-12-29 1984-12-29 Ultraviolet-ray irradiating device

Publications (1)

Publication Number Publication Date
JPS61158453A true JPS61158453A (en) 1986-07-18

Family

ID=17561317

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27585184A Pending JPS61158453A (en) 1984-12-29 1984-12-29 Ultraviolet-ray irradiating device

Country Status (1)

Country Link
JP (1) JPS61158453A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07508360A (en) * 1992-06-29 1995-09-14 クーツウェイル・アプライド・インテリジェンス・インコーポレーテッド Speech recognition system using vocabulary model preliminary selection

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07508360A (en) * 1992-06-29 1995-09-14 クーツウェイル・アプライド・インテリジェンス・インコーポレーテッド Speech recognition system using vocabulary model preliminary selection

Similar Documents

Publication Publication Date Title
KR101030421B1 (en) Light irradiation device
US5608227A (en) Mercury-vapor high-pressure short-arc discharge lamp, and method and apparatus for exposure of semiconductor wafers to radiation emitted from said lamp
TWI453356B (en) Uv led based lamp for compact uv curing lamp assemblies
US5932886A (en) Ultraviolet irradiation device
US4864145A (en) Apparatus and method for curing photosensitive coatings
CN104780945A (en) Compact system with high homgenity of the radiation field
JP2007173090A (en) Ultraviolet light source system
JP2002175711A (en) Reflector for ultraviolet lamp system
JP2002093377A (en) Dielectric barrier discharge lamp device
US20040211927A1 (en) Infrared radiator and irradiation apparatus
JPS61158451A (en) Ultraviolet-ray irradiating device
JPS61158453A (en) Ultraviolet-ray irradiating device
JPH0586338B2 (en)
JPS61158452A (en) Ultraviolet-ray irradiating device
JP2008130302A (en) Light irradiation device
JPH0646304B2 (en) UV curing irradiation device
JPS61158454A (en) Ultraviolet-ray irradiating device
CN111508872B (en) Light irradiation device and semiconductor processing apparatus
US20200324003A1 (en) Uv steriliser assembly and method of constructing same
JPH0438703B2 (en)
JP2915181B2 (en) Microwave electrodeless light emitting device
JP5126965B2 (en) Water-cooled UV irradiation device
JPH03280345A (en) Reflex type ultraviolet lamp
JPS61261055A (en) Ultraviolet ray irradiation device
JP2003091071A (en) Ultraviolet ray irradiator