JPS6115737U - Wafer testing equipment - Google Patents

Wafer testing equipment

Info

Publication number
JPS6115737U
JPS6115737U JP10076884U JP10076884U JPS6115737U JP S6115737 U JPS6115737 U JP S6115737U JP 10076884 U JP10076884 U JP 10076884U JP 10076884 U JP10076884 U JP 10076884U JP S6115737 U JPS6115737 U JP S6115737U
Authority
JP
Japan
Prior art keywords
wafer testing
testing equipment
wafer
container part
stand
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10076884U
Other languages
Japanese (ja)
Inventor
康 馬橋
Original Assignee
島田理化工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 島田理化工業株式会社 filed Critical 島田理化工業株式会社
Priority to JP10076884U priority Critical patent/JPS6115737U/en
Publication of JPS6115737U publication Critical patent/JPS6115737U/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案に係るウエーノ１試験襞置の一実施例の
縦断面図、第２図は第１図に示すウエーハ試験装置の上
側容器部を外した状態でのウエーハのセット過程を示す
縦断面図、第３図は従来のウエーハ試験装置の縦断面図
である。 １・・・容器、ＩＡ・・・下側容器部、−１Ｂ・・・上
側容器部、２・・・底板、３・・二脚、４・・・試料台
、５・・・ウエー−ハ、６・・・プローブ台、７・・・
脚、８・・・プローブ、１０・・・蓋、１２・・・分割
面、１３・・・ウエーハ案内台。Fig. 1 is a longitudinal cross-sectional view of an embodiment of the wafer test fold arrangement according to the present invention, and Fig. 2 shows the wafer setting process with the upper container section of the wafer testing apparatus shown in Fig. 1 removed. FIG. 3 is a vertical cross-sectional view of a conventional wafer testing apparatus. DESCRIPTION OF SYMBOLS 1... Container, IA... Lower container part, -1B... Upper container part, 2... Bottom plate, 3... Bipod, 4... Sample stand, 5... Wafer , 6... probe stand, 7...
Legs, 8...probe, 10...lid, 12...dividing surface, 13...wafer guide stand.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 容器内に試料台が設置され、前記試料台上にウエーハが
設置されるようになっているウエーノＸ試験装置におい
て、前記容器が前記試料台の上面より下の位置で上下に
分割されて下側容器部と上側容器部に分けられ、前記試
料台の側面には該試料台の上面と特等しいか或はやや高
い高さでウエーハ案内台が設けられていることを特徴と
するウエーハ試験装置。In a Waeno A wafer testing apparatus characterized in that it is divided into a container part and an upper container part, and a wafer guide stand is provided on the side surface of the sample stand at a height that is equal to or slightly higher than the upper surface of the sample stand.
JP10076884U 1984-07-04 1984-07-04 Wafer testing equipment Pending JPS6115737U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10076884U JPS6115737U (en) 1984-07-04 1984-07-04 Wafer testing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10076884U JPS6115737U (en) 1984-07-04 1984-07-04 Wafer testing equipment

Publications (1)

Publication Number Publication Date
JPS6115737U true JPS6115737U (en) 1986-01-29

Family

ID=30660213

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10076884U Pending JPS6115737U (en) 1984-07-04 1984-07-04 Wafer testing equipment

Country Status (1)

Country Link
JP (1) JPS6115737U (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS513743U (en) * 1974-06-25 1976-01-12
JPS5413777A (en) * 1977-07-01 1979-02-01 Nec Corp Photo resist coater of semiconductor wafers
JPS57102009A (en) * 1980-12-17 1982-06-24 Nec Corp Semiconductor device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS513743U (en) * 1974-06-25 1976-01-12
JPS5413777A (en) * 1977-07-01 1979-02-01 Nec Corp Photo resist coater of semiconductor wafers
JPS57102009A (en) * 1980-12-17 1982-06-24 Nec Corp Semiconductor device

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