JPS61157328U - - Google Patents
Info
- Publication number
- JPS61157328U JPS61157328U JP1985038780U JP3878085U JPS61157328U JP S61157328 U JPS61157328 U JP S61157328U JP 1985038780 U JP1985038780 U JP 1985038780U JP 3878085 U JP3878085 U JP 3878085U JP S61157328 U JPS61157328 U JP S61157328U
- Authority
- JP
- Japan
- Prior art keywords
- reticle
- fixing
- transport mechanism
- moving
- transport
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007723 transport mechanism Effects 0.000 claims 3
- 230000007246 mechanism Effects 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Description
第１図は本考案の適用対象例を示す概念構成図
、第２図は従来技術例を示す平面図、第３図は本
考案の一実施例を示す平面図、第４図は動作概念
構成図、第５図は平面図である。
３……レチクル固定台、４……レチクル、３Ｃ
……レチクル搬送装置、３Ｃ′……ピン。
Fig. 1 is a conceptual configuration diagram showing an example of the application of the present invention, Fig. 2 is a plan view showing an example of the prior art, Fig. 3 is a plan view showing an embodiment of the present invention, and Fig. 4 is a conceptual configuration diagram of the operation. FIG. 5 is a plan view. 3... Reticle fixing base, 4... Reticle, 3C
...Reticle transport device, 3C'...pin.
Claims (1)
機能をもつレチクル固定台と、レチクルを第１の
位置から前記レチクル固定台へ移動するレチクル
搬送機構から成るレチクルの位置決め機構におい
て、前記レチクル搬送機構がレチクル固定台移動
中にレチクルを固定する機能をもつたことを特徴
とするレチクル位置決め機構。 ２ 前記レチクル搬送機構が、前記レチクル固定
台の一定の位置へレチクルを搬送するように構成
されていることを特徴とする実用新案登録請求の
範囲第１項記載のレチクル位置決め機構。[Claims for Utility Model Registration] 1. Reticle positioning consisting of a reticle fixing table that has the function of fixing the reticle and moving it in the horizontal direction, and a reticle transport mechanism that moves the reticle from a first position to the reticle fixing table. A reticle positioning mechanism, characterized in that the reticle transport mechanism has a function of fixing the reticle while the reticle fixing base is moving. 2. The reticle positioning mechanism according to claim 1, wherein the reticle transport mechanism is configured to transport the reticle to a predetermined position on the reticle fixing base.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985038780U JPS61157328U (en) | 1985-03-20 | 1985-03-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985038780U JPS61157328U (en) | 1985-03-20 | 1985-03-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61157328U true JPS61157328U (en) | 1986-09-30 |
Family
ID=30546102
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985038780U Pending JPS61157328U (en) | 1985-03-20 | 1985-03-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61157328U (en) |
-
1985
- 1985-03-20 JP JP1985038780U patent/JPS61157328U/ja active Pending