JPS61157328U - - Google Patents
Info
- Publication number
- JPS61157328U JPS61157328U JP1985038780U JP3878085U JPS61157328U JP S61157328 U JPS61157328 U JP S61157328U JP 1985038780 U JP1985038780 U JP 1985038780U JP 3878085 U JP3878085 U JP 3878085U JP S61157328 U JPS61157328 U JP S61157328U
- Authority
- JP
- Japan
- Prior art keywords
- reticle
- fixing
- transport mechanism
- moving
- transport
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007723 transport mechanism Effects 0.000 claims 3
- 230000007246 mechanism Effects 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985038780U JPS61157328U (de) | 1985-03-20 | 1985-03-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985038780U JPS61157328U (de) | 1985-03-20 | 1985-03-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61157328U true JPS61157328U (de) | 1986-09-30 |
Family
ID=30546102
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1985038780U Pending JPS61157328U (de) | 1985-03-20 | 1985-03-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61157328U (de) |
-
1985
- 1985-03-20 JP JP1985038780U patent/JPS61157328U/ja active Pending